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This article presents a self‐reference algorithm to improve the accuracy of micro‐electro‐mechanical system thermoelectric microwave power sensor (5‐15 GHz). The output thermovoltage of the sensor is not only a function of the input signal power, but also relates to the signal frequency, resulting in low accuracy of the sensor. In this article, a mathematical model is established for the sensor to analyze the reasons for frequency dependence. Moreover, an algorithm is derived from analyzing the characteristics of the model and the experimental results. The algorithm relieves the dependence on the thermovoltage and frequency. Experiments show that the relative error of the sensor based on the proposed self‐reference algorithm decreases from 22% to 1.6%, and the SD is smaller than 0.4 mW. This self‐reference algorithm plays critical role in the practical application of microwave power sensors. [ABSTRACT FROM AUTHOR]