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A fundamental understanding of the diffusion phenomena of submonolayer polar liquid films is important for achieving reliable lubrication between moving mechanical parts separated by a nanometer-sized gap. To acquire this understanding, we conducted molecular dynamics (MD) simulations of diffusion phenomena of submonolayer polar perfluoropolyether (PFPE) Zdol films on solid surfaces. To improve the accuracy of these simulations, we developed an all-atom model that includes hydrogen-bond potential and refined atomic charges for Zdol molecules and tested it through MD simulations of spreading of step-shaped submonolayer PFPE films. Our MD simulations reproduced the experimentally observed effects of polar end groups on the diffusion speed and molecular conformation of Zdol. We then conducted MD simulations of self-diffusion of submonolayer Zdol films; these simulations demonstrated that as the thickness of the submonolayer Zdol films decreases, molecular conformation becomes flatter and the self-diffusion coefficient decreases. These changes in molecular conformation partially explain our experimental finding that the spreading of step-shaped submonolayer polar PFPE films slows down with decreasing initial thickness. [ABSTRACT FROM AUTHOR]