Author: "Zhang, Zhouwei" / Journal: micromachines - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Zhang, Zhouwei"' showing total 4 results

Start Over Author "Zhang, Zhouwei" Journal micromachines

4 results on '"Zhang, Zhouwei"'

1. A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation

Author: Liu, Xiangming, primary, Xia, Shanhong, additional, Peng, Chunrong, additional, Gao, Yahao, additional, Peng, Simin, additional, Zhang, Zhouwei, additional, Zhang, Wei, additional, Xing, Xuebin, additional, and Liu, Yufei, additional
Published: 2023
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2. Wafer-Level Vacuum-Packaged Electric Field Microsensor: Structure Design, Theoretical Model, Microfabrication, and Characterization

Author: Liu, Jun, primary, Xia, Shanhong, additional, Peng, Chunrong, additional, Wu, Zhengwei, additional, Chu, Zhaozhi, additional, Zhang, Zhouwei, additional, Lei, Hucheng, additional, Zheng, Fengjie, additional, and Zhang, Wei, additional
Published: 2022
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3. Resolution-Enhancing Structure for the Electric Field Microsensor Chip

Author: Wen, Xiaolong, primary, Yang, Pengfei, additional, Zhang, Zhouwei, additional, Chu, Zhaozhi, additional, Peng, Chunrong, additional, Liu, Yutao, additional, Wu, Shuang, additional, Zhang, Bo, additional, and Zheng, Fengjie, additional
Published: 2021
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4. An Electric Field Microsensor with Mutual Shielding Electrodes

Author: Lei, Hucheng, primary, Xia, Shanhong, additional, Chu, Zhaozhi, additional, Ling, Biyun, additional, Peng, Chunrong, additional, Zhang, Zhouwei, additional, Liu, Jun, additional, and Zhang, Wei, additional
Published: 2021
Full Text: View/download PDF

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