1. 20 MHz) Ultrasonic Array Transducer Applications
- Author
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Lei, Zhihong, Chen, Yan, Xu, Guisheng, Liu, Jinfeng, Yuan, Maodan, Zeng, Lvming, Ji, Xuanrong, and Wu, Dawei
- Subjects
PMN–31%PT single crystals ,high-frequency transducer ,ferroelectric domain ,piezoelectric coefficient ,piezoelectric performance ,laser micromachining ,micron-sized kerf - Abstract
A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg1/3Nb2/3)&ndash, x%PbTiO3 (PMN&ndash, x%PT) for high-frequency (>, 20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN&ndash, 31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using a 355 nm laser. We studied the kerf profile as a function of laser parameters, revealing that micron-sized kerfs with designated profiles and fewer micro-cracks can be obtained by optimizing the laser parameters. The domain morphology of micromachined PMN&ndash, 31%PT was thoroughly analyzed to validate the superior piezoelectric performance maintained near the kerfs. A high piezoresponse of the samples after micromachining was also successfully demonstrated by determining the effective piezoelectric coefficient (d33*~1200 pm/V). Our results are promising for fabricating superior PMN&ndash, 31%PT and other piezoelectric high-frequency (>, 20 MHz) ultrasonic array transducers.
- Published
- 2020
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