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10 results on '"Wang Hongcheng"'

1. Efficient Mixed-Type Wafer Defect Pattern Recognition Based on Light-Weight Neural Network.

Author

Deng, Guangyuan and Wang, Hongcheng

Subjects
ARTIFICIAL neural networks, SEMICONDUCTOR wafers, FEATURE extraction, MANUFACTURING processes, RECOGNITION (Psychology)
Abstract

Wafer defect pattern recognition can help engineers improve the production process of semiconductor chips. In real industrial scenarios, the recognition of mixed-type wafer defects is difficult and the production scale of semiconductor wafers is large, which requires high accuracy and speed in wafer defect pattern recognition. This study proposes a light-weight neural network model to efficiently recognize mixed-type wafer defects. The proposed model is constructed via inverted residual convolution blocks with attention mechanisms and large kernel convolution downsampling layers. The inference speed of the inverted residual convolution block is fast, and the attention mechanism can enhance feature extraction capabilities. Large kernel convolutions help the network retain more important feature information during downsampling operations. The experimental results on the real Mixed-type WM38 dataset show that the proposed model achieves a recognition accuracy of 98.69% with only 1.01 M parameters. Compared with some popular high-performance models and light-weight models, our model has advantages in both recognition accuracy and inference speed. Finally, we deploy the model as a TensorRT engine, which significantly improves the inference speed of the model, enabling it to process more than 1300 wafer maps per second. [ABSTRACT FROM AUTHOR]

Published
2024
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4. A New Inner Fabrication Method of Internal Cavity in Metal under Compound Acoustic Fields.

Author

Zhang, Zheng, Wu, Liqun, Wang, Yaxing, Wang, Ze'en, Wu, Guanwu, Wang, Yajing, and Wang, Hongcheng

Subjects
ACOUSTIC field, METAL compounds, SOUND pressure, MELTING points, ACOUSTIC models, GALLIUM alloys
Abstract

In order to realize direct manufacturing of cavity inside metal without assembly, this paper investigates the mechanism of cavity manufacturing inside metals under compound acoustic fields. First, a local acoustic cavitations model is established to study the single bubble generation at fixed point in Ga-In metal droplets, which has a low melting point. Second, cavitation-levitation acoustic composite fields are integrated with the experimental system for simulation and experimentation. Through COMSOL simulation and experimentation, this paper expounds the manufacturing mechanism of metal internal cavity under acoustic composite fields. The key problem is to control the duration of the cavitation bubble by controlling the driving acoustic pressure's frequency and the magnitude of ambient acoustic pressure. Under the condition of composite acoustic fields, this method realizes the direct fabrication of cavity inside Ga-In alloy for the first time. [ABSTRACT FROM AUTHOR]

Published
2023
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5. Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model

Author

Linan Zhang, Chen Chao, Chen Jianlong, Wang Hongcheng, and Liqun Wu

Subjects
Fabrication, Silicon, chemistry.chemical_element, Physics::Optics, 02 engineering and technology, Substrate (electronics), 010402 general chemistry, 01 natural sciences, Article, law.invention, law, temperature field, TJ1-1570, Mechanical engineering and machinery, Electrical and Electronic Engineering, Physics, business.industry, Mechanical Engineering, 021001 nanoscience & nanotechnology, Laser, Aspect ratio (image), Surface energy, diffuse interface model, 0104 chemical sciences, chemistry, Control and Systems Engineering, micro/nano-structures, Femtosecond, Surface modification, Optoelectronics, 0210 nano-technology, business, micro/nano-cantilever sensor
Abstract

This work proposes a detailed process of micro/nano-structure surface modification in relation to temperature field. In this paper, a femtosecond laser is used to induce the surface morphology of a silicon substrate. We provide a new method for the fabrication of a micro/nano-cantilever probe by controlling the aspect ratio of the silicon surface morphology. A computational method is used to investigate the mechanical behaviors of early perturbation to late-stage structure. A diffuse interface model is employed to describe the evolution and provide a general framework. The theoretical model of femtosecond laser control surface morphology is verified by the experiments. For systematic study, the model involves the interface energy and kinetics of diffusion. This method provides an effective way to improve the sensitivity of micro/nano-cantilever sensors.

Published
2021

7. A Novel Fabricating Process of Catalytic Gas Sensor Based on Droplet Generating Technology

Author

Liqun Wu, Chengxin Tang, Wang Hongcheng, Ting Zhang, and Linan Zhang

Subjects
Materials science, Explosive material, lcsh:Mechanical engineering and machinery, chemistry.chemical_element, 02 engineering and technology, pulse inertia force, 01 natural sciences, Article, Catalysis, gas sensor, micropellistor, lcsh:TJ1-1570, Electrical and Electronic Engineering, Suspension (vehicle), microdroplet, business.industry, Pellistor, Mechanical Engineering, methane, 010401 analytical chemistry, 021001 nanoscience & nanotechnology, 0104 chemical sciences, chemistry, Control and Systems Engineering, Electromagnetic coil, Bridge circuit, Optoelectronics, 0210 nano-technology, Platinum, business, Palladium
Abstract

Catalytic gas sensors are widely used for measuring concentrations of combustible gases to prevent explosive accidents in industrial and domestic environments. The typical structure of the sensitive element of the sensor consists of carrier and catalyst materials, which are in and around a platinum coil. However, the size of the platinum coil is micron-grade and typically has a cylindrical shape. It is extremely difficult to control the amount of carrier and catalyst materials and to fulfill the inner cavity of the coil, which adds to the irreproducibility and uncertainty of the sensor performance. To solve this problem, this paper presents a new method which uses a drop-on-demand droplet generator to add the carrier and catalytic materials into the platinum coil and fabricate the micropellistor. The materials in this article include finely dispersed Al2O3 suspension and platinum palladium (Pd-Pt) catalyst. The size of the micropellistor with carrier material can be controlled by the number of the suspension droplets, while the amount of Pd-Pt catalyst can be controlled by the number of catalyst droplets. A bridge circuit is used to obtain the output signal of the gas sensors. The original signals of the micropellistor at 140 mV and 80 mV remain after aging treatment. The sensitivity and power consumption of the pellistor are 32 mV/% CH4 and 120 mW, respectively.

Published
2019
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10. Micro-Dosing of Fine Cohesive Powders Actuated by Pulse Inertia Force

Author

Liqun Wu, Ting Zhang, Wang Hongcheng, Rangrang Chen, and Zhao Miaomiao

Subjects
Materials science, lcsh:Mechanical engineering and machinery, Nozzle, 02 engineering and technology, pulse inertia force, 01 natural sciences, Article, fine powder, micro-dosing, piezoelectric actuator, nozzle, Inertia force, lcsh:TJ1-1570, Piezoelectric actuators, Electrical and Electronic Engineering, Composite material, Range (particle radiation), 010405 organic chemistry, Mechanical Engineering, 021001 nanoscience & nanotechnology, 0104 chemical sciences, Pulse (physics), Amplitude, Control and Systems Engineering, Particle, 0210 nano-technology, Body orifice
Abstract

Micro-dosing of fine cohesive powders is the key technology in additive manufacturing and especially in high-potency active pharmaceutical ingredients (HPAPI). However, high accuracy micro-dosing (

Published
2018
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