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Aspherical surfaces, with their varying curvature, minimize aberrations and enhance clarity, making them essential in optics, aerospace, medical devices, and telecommunications. However, manufacturing these surfaces is challenging because of systematic errors in CNC equipment, tool wear, measurement inaccuracies, and environmental disturbances. These issues necessitate precise error compensation to achieve the desired surface shape. Traditional methods for spherical optics are inadequate for aspherical components, making accurate surface shape error detection and compensation crucial. This study integrates advanced metrology with optimized material removal functions in the grinding and polishing processes. By combining numerical control technology, computer technology, and data analysis, we developed CAM software (version 1) tailored for aspherical surfaces. This software uses a compensation correction algorithm to process error data and generate NC programs for machining. Our approach automates and digitizes the grinding and polishing process, improving efficiency and surface accuracy. This advancement enables high-precision mass production of rotationally symmetrical aspherical optical components, addressing existing manufacturing challenges and enhancing optical system performance. [ABSTRACT FROM AUTHOR]

The high-efficiency preparation of large-area microstructures of optical materials and precision graphic etching technology is one of the most important application directions in the atomic and near-atomic-scale manufacturing industry. Traditional focused ion beam (FIB) and reactive ion etching (RIE) methods have limitations in precision and efficiency, hindering their application in automated mass production. The pulsed ion beam (PIB) method addresses these issues by enhancing ion beam deflection to achieve high-resolution material removal on a macro scale, which can reach the equivalent removal resolution of 6.4 × 10−4 nm. Experiments were conducted on a quartz sample (10 × 10 × 1 mm) with a specific pattern mask using the custom PIB processing device. The surface morphology, etching depth, and roughness were measured post-process. The results demonstrated that precise control over cumulative sputtering time yielded well-defined patterns with expected average etching depths and surface roughness. This confirms the PIB technique's potential for precise atomic depth image transfer and its suitability for industrial automation, offering a significant advancement in microfabrication technology. [ABSTRACT FROM AUTHOR]

Temperature can reflect vital activities, and researchers have attempted to guide Chinese medicine diagnosis and treatment by observing acupoint temperature changes. Integrating a temperature sensor at the needle tip enables in situ acupoint temperature measurement. However, the sensor needles for acupoint temperature monitoring designed in previous studies were fabricated by manually soldering thermistor beads and metal wires, making mass production difficult. In this work, using MEMS manufacturing technology, a flexible temperature sensor that can be integrated at the needle tip is proposed and can be mass-produced on silicon wafers. The sensor uses a Pt thermistor as the temperature-sensing element and has a slender flexible structure with dimensions of 125 μm width by 3.2 cm length. As the sensor is inserted into a hollow needle, the Pt thermistor is glued to the needle tip. In the temperature range of 30 °C to 50 °C, the fabricated temperature sensor has a sensitivity of 5.00 Ω∙°C−1, a nonlinearity of ±0.39%FS, and a repeatability error of ±2.62%FS. Additionally, the sensor has been applied to in vivo acupoint temperature monitoring experiments in rats and demonstrated good performance, suggesting its promise for future research on acupoint temperature. [ABSTRACT FROM AUTHOR]

Wafer-scale blue micro-light-emitting diode (micro-LED) arrays were fabricated with a pixel size of 12 μm, a pixel pitch of 15 μm, and a pixel density of 1692 pixels per inch, achieved by optimizing the properties of e-beam-deposited and sputter-deposited indium tin oxide (ITO). Although the sputter-deposited ITO (S-ITO) films exhibited a densely packed morphology and lower resistivity compared to the e-beam-deposited ITO (E-ITO) films, the forward voltage (VF) values of a micro-LED with the S-ITO films were higher than those with the E-ITO films. The VF values for a single pixel and for four pixels with E-ITO films were 2.82 V and 2.83 V, respectively, while the corresponding values for S-ITO films were 3.50 V and 3.52 V. This was attributed to ion bombardment damage and nitrogen vacancies in the p-GaN layer. Surprisingly, the VF variations of a single pixel and of four pixels with the optimized E-ITO spreading layer from five different regions were only 0.09 V and 0.10 V, respectively. This extremely uniform VF variation is suitable for creating micro-LED displays to be used in AR and VR applications, circumventing the bottleneck in the development of long-lifespan and high-brightness organic LED devices for industrial mass production. [ABSTRACT FROM AUTHOR]

Millimeter-scale biopsy tools combined with an endoscope instrument have been widely used for minimal invasive surgery and medical diagnosis. Recently, a capsule-type endoscope was developed, which requires micromachining to fabricate micro-scale biopsy tools that have a sharp tip and other complex features, e.g., nanometer-scale end-tip sharpness and a complex scalpel design. However, conventional machining approaches are not cost-effective for mass production and cannot fabricate the micrometer-scale features needed for biopsy tools. Here, we demonstrate an electroplated nickel micro-biopsy tool which features a planar shape and is suitable to be equipped with a capsule-type endoscope. Planar-type micro-biopsy tools are designed, fabricated, and evaluated through in vitro tissue dissection experiments. Various micro-biopsy tools with a long shaft and sharp tip can be easily fabricated using a thick photoresist (SU8) mold via a simple one-step lithography and nickel electroplating process. The characteristics of various micro-biopsy tool design features, including a tip taper angle, different tool geometries, and a cutting scalpel, are evaluated for efficient tissue extraction from mice intestine. These fabricated biopsy tools have shown appropriate strength and sharpness with a sufficient amount of tissue extraction for clinical applications, e.g., cancer tissue biopsy. These micro-scale biopsy tools could be easily integrated with a capsule-type endoscope and conventional forceps. [ABSTRACT FROM AUTHOR]

The article represents the design of two port-based printed MIMO antenna structures that have the advantages of low profile, simple structure, good isolation, peak gain, directive gain, and reflection coefficient. The performance characteristics are observed for the four design structures by cropping the patch region, loading the slits near the hexagonal-shaped patch, and adding and removing the slots in the ground area. The antenna provides a least reflection coefficient of −39.44 dB, a maximum electric field of patch region of 33.3 V/cm, a total gain of 5.23 dB, and good values of total active reflection coefficient and diversity gain. The proposed design provides nine bands' response, a peak bandwidth of 2.54 GHz, and a peak bandwidth of 26.127 dB. The four proposed structures are fabricated using a low-profile material to support mass production. The comparison among simulated and fabricated structures is included to check the authenticity of the work. The performance assessment of the proposed design with other published articles is carried out for the performance observation. The suggested technique is analyzed over the wideband of frequency region 1 GHz to 14 GHz. The multiple band responses make the proposed work suitable for wireless applications in S/C/X/Ka bands. [ABSTRACT FROM AUTHOR]

Microlens arrays have been widely employed to control the reflection, refraction, and diffraction characteristics of light due to its distinctive surface properties. Precision glass molding (PGM) is the primary method for the mass production of microlens arrays, of which pressureless sintered silicon carbide (SSiC) is a typical mold material due to its excellent wear resistance, high thermal conductivity, high-temperature resistance, and low thermal expansion. However, the high hardness of SSiC makes it hard to be machined, especially for optical mold material that requires good surface quality. The lapping efficiency of SSiC molds is quite low. and the underlying mechanism remains insufficiently explored. In this study, an experimental study has been performed on SSiC. A spherical lapping tool and diamond abrasive slurry have been utilized and various parameters have been carried out to achieve fast material removal. The material removal characteristics and damage mechanism have been illustrated in detail. The findings reveal that the material removal mechanism involves a combination of ploughing, shearing, micro-cutting, and micro-fracturing, which aligns well with the results obtained from finite element method (FEM) simulations. This study serves as preliminary reference for the optimization of the precision machining of SSiC PGM molds with high efficiency and good surface quality. [ABSTRACT FROM AUTHOR]

The three-body coupling grinding mode of a ball ensures the batch diameter variation and batch consistency of precision ball machining based on the principle of ball forming, resulting in a structure that is simply and feasibly controllable. The change in the rotation angle can be jointly determined using the fixed load of the upper grinding disc and the rotation speed coordination of the inner and outer discs of the lower grinding disc. Related to this, the rotation speed is an important index to guarantee grinding uniformity. To ensure the quality of three-body coupling grinding, this study aims to establish the best mathematical control model of the rotation speed curve of the inner and outer discs in the lower grinding disc. Specifically, it includes two aspects. First, the optimization of the rotation speed curve was mainly studied, and the machining process was simulated with three speed curve combinations: 1, 2, and 3. By analyzing the evaluation index of ball grinding uniformity, the results revealed that the third speed curve combination had the best grinding uniformity, and the three speed curve combinations were optimized on the basis of the traditional triangular wave speed curve. Furthermore, the obtained double trapezoidal speed curve combination not only achieved the traditionally verified stability performance but also overcame the shortcomings of the other speed curves. The mathematical model established in this way was equipped with a grinding control system, which improved the fine control ability of the rotation angle state of the ball blank under the three-body coupling grinding mode. It also obtained the best grinding uniformity and sphericity and laid a theoretical foundation for achieving a grinding effect that was close to the ideal circumstance during mass production. Second, via theoretical comparison and analysis, it was determined that the ball shape and sphericity deviation (SPD) were more accurate than the standard deviation (STD) of the two-dimensional trajectory point distribution. The SPD evaluation method was also investigated via the optimization analysis of the rotation speed curve by means of the ADAMAS simulation. The obtained results coincided with the STD evaluation trend, thus laying a preliminary foundation for subsequent applications. [ABSTRACT FROM AUTHOR]

Hexagonal cube corner retroreflectors (HCCRs) are the micro-optics arrays with the highest reflectivity. However, these are composed of prismatic micro-cavities with sharp edges, and conventional diamond cutting is considered unmachinable. Besides, 3-linear-axis ultraprecision lathes were considered unfeasible to fabricate HCCRs due to the lack of a rotation axis. Therefore, a new machining method is proposed as a viable option to manufacture HCCRs on the 3-linear-axis ultraprecision lathes in this paper. For the mass production of HCCRs, the dedicated diamond tool is designed and optimized. The toolpaths are proposed and optimized to further increase tool life and machining efficiency. The Diamond Shifting Cutting (DSC) method is analyzed in-depth both theoretically and experimentally. By using the optimized methods, the large-area HCCRs with a structure size of 300 µm covering an area of 10 × 12 mm2 are successfully machined on 3-linear-axis ultraprecision lathes. The experimental results show that the whole array is highly uniform, and the surface roughness Sa of three cube corner facets is all less than 10 nm. More importantly, the machining time is reduced to 19 h, which is far less than the previous processing methods (95 h). This work will significantly reduce the production threshold and costs, which is important to promote the industrial application of HCCRs. [ABSTRACT FROM AUTHOR]

A large-aperture silicon carbide (SiC) aspheric mirror has the advantages of being light weight and having a high specific stiffness, which is the key component of a space optical system. However, SiC has the characteristics of high hardness and multi-component, which makes it difficult to realize efficient, high-precision, and low-defect processing. To solve this problem, a novel process chain combining ultra-precision shaping based on parallel grinding, rapid polishing with central fluid supply, and magnetorheological finishing (MRF) is proposed in this paper. The key technologies include the passivation and life prediction of the wheel in SiC ultra-precision grinding (UPG), the generation and suppression mechanism of pit defects on the SiC surface, deterministic and ultra-smooth polishing by MRF, and compensation interference detection of the high-order aspheric surface by a computer-generated hologram (CGH). The verification experiment was conducted on a Ø460 mm SiC aspheric mirror, whose initial surface shape error was 4.15 μm in peak-to-valley (PV) and a root-mean-square roughness (Rq) of 44.56 nm. After conducting the proposed process chain, a surface error of RMS 7.42 nm and a Rq of 0.33 nm were successfully obtained. Moreover, the whole processing cycle is only about 216 h, which sheds light on the mass production of large-aperture silicon carbide aspheric mirrors. [ABSTRACT FROM AUTHOR]

Multiband terahertz (THz) detectors show great application potential in imaging, spectroscopy, and sensing fields. Thermal detectors have become a promising choice because they could sense THz radiations on the whole spectrum. This paper demonstrates the operation principle, module designs with in-depth theoretical analysis, and experimental validation of a room-temperature CMOS monolithic resonant triple-band THz thermal detector. The detector, which consists of a compact triple-band octagonal ring antenna and a sensitive proportional to absolute temperature (PTAT) sensor, has virtues of room-temperature operation, low cost, easy integration, and mass production. Good experimental results are obtained at 0.91 THz, 2.58 THz, and 4.2 THz with maximum responsivities of 32.6 V/W, 43.2 V/W, and 40 V/W, respectively, as well as NEPs of 1.28 μW/Hz0.5, 2.19 μW/Hz0.5, and 2.37 μW/Hz0.5, respectively, providing great potential for multiband THz sensing and imaging systems. [ABSTRACT FROM AUTHOR]

Single-cell manipulation in microfluidic channels at the micrometer scale has recently become common. However, the current mainstream method using a syringe pump and a piezoelectric actuator is not suitable for long-term experiments. Some methods incorporate a pump mechanism into a microfluidic channel, but they are not suitable for mass production owing to their complex structures. Here, we propose a sidewall-driven micropump integrated into a microfluidic device as well as a method for reducing the pulsation of flow. This sidewall-driven micropump consists of small chambers lined up on both sides along the main flow path, with a wall separating the flow path and each chamber being deformed by air pressure. The chambers are pressurized to make the peristaltic motion of the wall possible, which generates flow in the main flow path. This pump can be created in a single layer, which allows a simplified structure to be achieved, although pulsation can occur when the pump is used alone. We created two types of chips with two micropumps placed in the flow path and attempted to reduce pulsation by driving them in different phases. The proposed dually driven micropump reduced pulsation when compared with the single pump. This device enables precise particle control and is expected to contribute to less costly and easier cell manipulation experiments. [ABSTRACT FROM AUTHOR]

Micro and nano manufacturing technologies can be used to machine materials ranging from polymers and metals to ceramics and other modern high-performance materials. Four numerical models to simulate the micro cutting of hardened steel were evaluated to choose which method of modelling can present the micro cutting process and to properly describe the size effect [[2]]. The surface properties of the punch and die tool played an important role in the micro extrusion process due to size effects and frictional effects. The size effect was also explored in forming processes, which is an enabler of cost-effective mass production. [Extracted from the article]

Polymethylmethacrylate (PMMA) is commonly applied to microfluidic devices due to its excellent biocompatibility, high optical transparency, and suitability for mass production. Recently, various surface treatment methods have been reported to improve the wettability of polymers, which is directly related to adhesion. In this research, the effect of a UV irradiation technique and an IPA rinsing technique as surface treatments for PMMA is investigated regarding the water contact angle of the PMMA surface. PMMA sheets that were 1.62 mm thick and commercially available were exposed to UV light with four different exposure times. Significant decreases in the water contact angle were observed after exposure to UV light, and the lowered contact angles due to the UV irradiation increased over time. According to the measurement, the water contact angle is a function of UV exposure dose as well as storage time after UV exposure. We examined the effect of a IPA rinsing process after UV irradiation and observed an increase in the water contact angle. [ABSTRACT FROM AUTHOR]

To simulate the ADME process such as absorption, distribution, metabolism, and excretion in the human body after drug administration and to confirm the applicability of the mass production process, a microfluidic chip injection molded with polycarbonate (injection-molded chip (I-M chip)) was fabricated. Polycarbonate materials were selected to minimize drug absorption. As a first step to evaluate the I-M chip, RPTEC (Human Renal Proximal Tubule Epithelial Cells) and HUVEC (Human Umbilical Vein Endothelial Cells) were co-cultured, and live and dead staining, TEER (trans-epithelial electrical resistance), glucose reabsorption, and permeability were compared using different membrane pore sizes of 0.4 μm and 3 μm. Drug excretion was confirmed through a pharmacokinetic test with metformin and cimetidine, and the gene expression of drug transporters was confirmed. As a result, it was confirmed that the cell viability was higher in the 3 μm pore size than in the 0.4 μm, the cell culture performed better, and the drug secretion was enhanced when the pore size was large. The injection-molded polycarbonate microfluidic chip is anticipated to be commercially viable for drug screening devices, particularly ADME tests. [ABSTRACT FROM AUTHOR]

Additive manufacturing (AM) is a technique that progressively deposits material in layer-by-layer manner (or in additive fashion) for producing a three-dimensional (3D) object, starting from the computer-aided design (CAD) model. This approach allows for the printing of complicated shaped objects and is quickly gaining traction in the aerospace, medical implant, jewelry, footwear, automotive, and fashion industries. AM, which was formerly used for single part customization, is currently being considered for mass customization of parts because of its positive impacts. However, part quality and build time are two main impediments to the deployment of AM for mass production. The optimal part orientation is fundamental for maximizing the part's quality as well as being critical for reducing the fabrication time. This research provides a new method for multi-part AM production that improves quality while reducing overall build time. The automatic setup planning or orientation approach described in this paper employs two objective functions: the quality of the build component and the build time. To tackle the given problem, it introduces a three-step genetic algorithm (GA)-based solution. A feature-based technique is utilized to generate a collection of finite alternative orientations for each component within a specific part group to ensure each part's individual build quality. Then, a GA was utilized to find the best combination of part build orientations at a global optimal level to reduce material consumption and build time. A case study of orienting nine components concurrently inside a given building chamber was provided for illustration. The findings suggest that the developed technique can increase quality, reduce support waste, and shorten overall production time. When components are positioned optimally rather than in random orientations, build time and support volume are reduced by approximately 7% and 16%, respectively. [ABSTRACT FROM AUTHOR]

Over the past few decades, NAND flash memory has advanced with exponentially-increasing bit growth. As bit cells in 3D NAND flash memory are stacked up and scaled down together, some potential challenges should be investigated. In order to reasonably predict those challenges, a TCAD (technology computer-aided design) simulation for 3D NAND structure in mass production has been run. By aggressively stacking-up and scaling-down bit cells in a string, the structure of channel hole was varied from a macaroni to nanowire. This causes the threshold voltage difference (ΔVth) between the top cell and bottom cell in the same string. In detail, ΔVth between the top cell and bottom cell mostly depends on the xy-scaling, but the way how ΔVth is affected is not very dependent on the stack height. [ABSTRACT FROM AUTHOR]

Free-form microhemispherical shell resonators have the advantages of high quality factor and mass production. The shape of microhemispherical shells created via this process is based on a single mold and is difficult to adjust, which affects the resonant frequency and quality factor. In this paper, a process analysis model is established through in-depth analysis of the process mechanism and flow of the free-forming method. Based on this model, the influence of the designed preforming parameters on the shape, resonant frequency and thermoelastic dissipation of the microhemispherical shell are analyzed in detail, providing theoretical guidance for parameter design. The results show that the depth and the ratio of internal to external pressure of the substrate's annular groove affect the height and thickness of the microhemispherical shell, and the structural thickness affects the thickness of the microhemispherical shell; these in turn affect the resonant frequency and thermoelastic dissipation of the microhemispherical shell resonator. In addition, the inner diameter of the substrate's annular groove mainly affects the radius of the support column of the microhemispherical shell, and the influence on the resonant frequency and thermoelastic dissipation of the resonator is relatively low. [ABSTRACT FROM AUTHOR]

Aquaculture plays an important role as one of the fastest-growing food-producing sectors in global food and nutritional security. Demand for animal protein in the form of fish has been increasing tremendously. Aquaculture faces many challenges to produce quality fish for the burgeoning world population. Cellular aquaculture can provide an alternative, climate-resilient food production system to produce quality fish. Potential applications of fish muscle cell lines in cellular aquaculture have raised the importance of developing and characterizing these cell lines. In vitro models, such as the mouse C2C12 cell line, have been extremely useful for expanding knowledge about molecular mechanisms of muscle growth and differentiation in mammals. Such studies are in an infancy stage in teleost due to the unavailability of equivalent permanent muscle cell lines, except a few fish muscle cell lines that have not yet been used for cellular aquaculture. The Prospect of cell-based aquaculture relies on the development of appropriate muscle cells, optimization of cell conditions, and mass production of cells in bioreactors. Hence, it is required to develop and characterize fish muscle cell lines along with their cryopreservation in cell line repositories and production of ideal mass cells in suitably designed bioreactors to overcome current cellular aquaculture challenges. [ABSTRACT FROM AUTHOR]

We proposed a novel Langasite (LGS) bonding method only using high temperature to solve the manufacturing difficulty of the sealed microcavity of pressure sensors. The optimal bonding parameters by comparative experiments were defined as 1350 °C for 3 h. Due to simple experimental conditions, low experimental cost, and be suitable for bonding wafers with various sizes, the method is convenient for popularization and mass-production, thus promoting the development of surface acoustic wave (SAW) devices at high temperatures. Simultaneously, an intact microcavity was observed by scanning electron microscopy, and a tight and void-free bonding interface with a transition layer thickness of 2.2 nm was confirmed via transmission electron microscopy. The results of tensile and leakage experiments indicated that the bonded wafer with the sealed microcavity exhibited a high bonding strength of 4.02 MPa and excellent seal performance. Compared to the original wafer, the piezoelectric constant of the LGS bonded wafer had a reduction of only 4.43%. The above characteristics show that the sealed microcavity prepared by this method satisfies the conditions for fabricating the LGS SAW pressure sensors. Additionally, based on the bonding interface characterizations, the mechanism of LGS bonding has been investigated for the first time. [ABSTRACT FROM AUTHOR]

To cope with ubiquitous wireless connectivity and the increased and faster data delivery in 5G communication, surface acoustic wave (SAW) filters are progressively requiring wider bandwidths. Conventional bulk 15°YX-LiNbO3 substrates with a large coupling coefficient (K2) are attractive for the low-cost mass production of wideband SAW filters, but these generally suffer from spurious responses, limiting their practical application. In this work, a novel and simple SAW configuration is proposed that uses thickness-modulated interdigital transducer (IDT) structures to overcome the limitations set by spurious responses. Different from the conventional design where the thicknesses of the IDT electrodes in the series and parallel resonators generally kept the same, the proposed configuration adopts IDT electrodes of different thicknesses in the series and shunt resonators to suppress or remove unwanted spurious Rayleigh modes from the filter passband. Two different ultra-wideband SAW filter designs employing thickness-modulated IDTs were designed and fabricated to validate the effective suppression of spurious modes. The SAW filters experimentally featured spurious-free responses in the passband as well as a large 3 dB fractional bandwidth (FBW) in the 18.0% and 24.1% ranges and low insertion losses below 1 dB. This work can significantly broaden the range of applications for SAW devices and can open a pathway to commercialize ultra-wideband SAW filters in 5G communication systems. [ABSTRACT FROM AUTHOR]

Optical accelerometers are popular in some applications because of their better immunity to electromagnetic interference, and they are often more sensitive than other accelerometer types. Optical fibers were employed in most previous generations, making micro-fabrication problematic. The optical accelerometers that are suitable for mass manufacture and previously mentioned in the literature have various problems and are only sensitive in one direction (1D). This study presents a novel optical accelerometer that provides 3D measurements while maintaining simple hybrid fabrication compatible with mass production. The operating concept is based on a power change method that allows for measurements without the need for complex digital signal processing (DSP). Springs hold the proof mass between a light-emitting diode and a quadrant photo-detector, allowing the proof mass to move along three axes. Depending on the magnitude and direction of the acceleration affecting the system, the proof mass moves by a certain amount in the corresponding axis, causing some quadrants of the quadrant detector to receive more light than other quadrants. This article covers the design, implementation, mechanical simulation, and optical modeling of the accelerometer. Several designs have been presented and compared. The best simulated mechanical sensitivity reaches 3.7 μm/G, while the calculated overall sensitivity and resolution of the chosen accelerometer is up to 156 μA/G and 56.2 μG, respectively. [ABSTRACT FROM AUTHOR]

Additive manufacturing (AM) is a technique that progressively deposits material in layer-by-layer manner (or in additive fashion) for producing a three-dimensional (3D) object, starting from the computer-aided design (CAD) model. This approach allows for the printing of complicated shaped objects and is quickly gaining traction in the aerospace, medical implant, jewelry, footwear, automotive, and fashion industries. AM, which was formerly used for single part customization, is currently being considered for mass customization of parts because of its positive impacts. However, part quality and build time are two main impediments to the deployment of AM for mass production. The optimal part orientation is fundamental for maximizing the part’s quality as well as being critical for reducing the fabrication time. This research provides a new method for multi-part AM production that improves quality while reducing overall build time. The automatic setup planning or orientation approach described in this paper employs two objective functions: the quality of the build component and the build time. To tackle the given problem, it introduces a three-step genetic algorithm (GA)-based solution. A feature-based technique is utilized to generate a collection of finite alternative orientations for each component within a specific part group to ensure each part’s individual build quality. Then, a GA was utilized to find the best combination of part build orientations at a global optimal level to reduce material consumption and build time. A case study of orienting nine components concurrently inside a given building chamber was provided for illustration. The findings suggest that the developed technique can increase quality, reduce support waste, and shorten overall production time. When components are positioned optimally rather than in random orientations, build time and support volume are reduced by approximately 7% and 16%, respectively.

Micro and nano molding technologies are continuously being developed due to enduring trends such as increasing miniaturization and the higher functional integration of products, devices and systems. Calaon et al. [[1]] analyzed and compared the process capability and design of conventional injection molding and of micro injection molding machines; Wöhner et al. [[2]] characterized the formation of blisters in film micro insert molding; Loaldi et al. [[3]] integrated direct ink writing with injection molding to generate micro conductive tracks in polymer devices. Weng et al. [[4]] modeled the demolding phase in nano scale molding by using molecular dynamic simulations; Loaldi et al. [[5]] simulated the micro injection molding process of both three-dimensional micro parts and micro structured components by applying multi-scale meshing and virtual design of experiment techniques. [Extracted from the article]

This paper presents a simple three-dimensional (3D) fabrication method based on soft lithography techniques and laminated object manufacturing. The method can create 3D structures that have undercuts with general machines for mass production and laboratory scale prototyping. The minimum layer thickness of the method is at least 4 μm and bonding strength between layers is over 330 kPa. The performance reaches conventional fabrication techniques used for two-dimensionally (2D)-designed microfluidic devices. We fabricated some 3D structures, i.e., fractal structures, spiral structures, and a channel-in-channel structure, in microfluidic channels and demonstrated 3D microfluidics. The fabrication method can be achieved with a simple black light for bio-molecule detection; thus, it is useful for not only lab-scale rapid prototyping, but also for commercial manufacturing. [ABSTRACT FROM AUTHOR]

The demand for graphene-based devices is rapidly growing but there are significant challenges for developing scalable and repeatable processes for the manufacturing of graphene devices. Basic research on understanding and controlling growth mechanisms have recently enabled various mass production approaches over the past decade. However, the integration of graphene with Micro-Nano Electromechanical Systems (MEMS/NEMS) has been especially challenging due to performance sensitivities of these systems to the production process. Therefore, ability to produce graphene-based devices on a large scale with high repeatability is still a major barrier to the commercialization of graphene. In this review article, we discuss the merits of integrating graphene into Micro-Nano Electromechanical Systems, current approaches for the mass production of graphene integrated devices, and propose solutions to overcome current manufacturing limits for the scalable and repeatable production of integrated graphene-based devices. [ABSTRACT FROM AUTHOR]

Compared to alternative production methods, cold forming offers technological, economic and ecological potential for the mass production of microgears. Within the current boundaries of the technology, the cold forming of modules m < 0.2 mm is not possible due to size effects, high tool stresses and handling problems. The investigations of this contribution present a novel process chain for the multi-step forming of microgears with a module of m = 0.1 mm. For this purpose, a numerical model of the first two steps of the process chain is set up and confirmed based on experimental forming tests. The results have proven the feasibility of the process chain by a complete forming of the gear teeth. [ABSTRACT FROM AUTHOR]

In this work, we present a fabrication process for microneedle sensors made of polylactic acid (PLA), which can be utilized for the electrochemical detection of various biomarkers in interstitial fluid. Microneedles were fabricated by the thermal compression molding of PLA into a laser machined polytetrafluoroethylene (PTFE) mold. Sensor fabrication was completed by forming working, counter, and reference electrodes on each sensor surface by Au sputtering through a stencil mask, followed by laser dicing to separate individual sensors from the substrate. The devised series of processes was designed to be suitable for mass production, where multiple microneedle sensors can be produced at once on a 4-inch wafer. The operational stability of the fabricated sensors was confirmed by linear sweep voltammetry and cyclic voltammetry at the range of working potentials of various biochemical molecules in interstitial fluid. [ABSTRACT FROM AUTHOR]

As one of the most popular research hotspot of lab-on-chip, digital microfluidic (DMF) technology based on the principle of electrowetting has unique advantages of high-precision, low cost and programmable control. However, due to the limitation of electrodes number, the throughput is hard to further upgrade. Therefore, active matrix electrowetting-on-dielectric (AM-EWOD) technology is a solution to acquire larger scale of driving electrodes. However, the process of manufacturing of AM-EWOD based on thin-film-transistor (TFT) is complex and expensive. Besides, the driving voltage of DMF chip is usually much higher than that of common display products.In this paper, a solution for mass production of AM-EWOD based on amorphous silicon (a-Si) is provided. Samples of 32 × 32 matrix AM-EWOD chips was designed and manufactured. A boost circuit was integrated into the pixel, which can raise the pixel voltage up by about 50%. Customized designed Printed Circuit Board (PCB) was used to supply the timing signals and driving voltage to make the motion of droplets programmable. The process of moving, mixing and generation of droplets was demonstrated.The minimum voltage in need was about 20 V and a velocity of up to 96 mm/s was achieved. Such an DMF device with large-scale matrix and low driving voltage will be very suitable for POCT applications. [ABSTRACT FROM AUTHOR]

A micromixer is one of the most significant components in a microfluidic system. A three-dimensional micromixer was developed with advantages of high efficiency, simple fabrication, easy integration, and ease of mass production. The designed principle is based on the concepts of splitting–recombination and chaotic advection. A numerical model of this micromixer was established to characterize the mixing performance for different parameters. A critical Reynolds number (Re) was obtained from the simulation results. When the Re number is smaller than the critical value, the fluid mixing is mainly dependent on the mechanism of splitting–recombination, therefore, the length of the channel capable of complete mixing (complete mixing length) increases as the Re number increases. When the Re number is larger than the critical value, the fluid mixing is dominated by chaotic advection, and the complete mixing length decreases as the Re number increases. For normal fluids, a complete mixing length of 500 µm can be achieved at a very small Re number of 0.007 and increases to 2400 µm as the Re number increases to the critical value of 4.7. As the Re number keep increasing and passes the critical Re number, the complete mixing length continues to descend to 650 µm at the Re number of 66.7. For hard-to-mix fluids (generally referring to fluids with high viscosity and low diffusion coefficient, which are difficult to mix), even though no evidence of strong chaotic advection is presented in the simulation, the micromixer can still achieve a complete mixing length of 2550 µm. The mixing performance of the micromixer was also verified by experiments. The experimental results showed a consistent trend with the numerical simulation results, which both climb upward when the Re number is around 0.007 (flow rate of 0.03 μm/min) to around 10 (flow rate of 50 μm/min), then descend when the Re number is around 13.3 (flow rate of 60 µm/min). [ABSTRACT FROM AUTHOR]

Advanced microsystems widely used in integrated optoelectronic devices, energy harvesting components, and microfluidic lab-on-chips require high-aspect silicon microstructures with a precisely controlled profile. Such microstructures can be fabricated using the Bosch process, which is a key process for the mass production of micro-electro-mechanical systems (MEMS) devices. One can measure the etching profile at a cross-section to characterize the Bosch process quality by cleaving the substrate into two pieces. However, the cleaving process of several neighboring deeply etched microstructures is a very challenging and uncontrollable task. The cleaving method affects both the cleaving efficiency and the metrology quality of the resulting etched microstructures. The standard cleaving technique using a diamond scriber does not solve this issue. Herein, we suggest a highly controllable cross-section cleaving method, which minimizes the effect on the resulting deep etching profile. We experimentally compare two cleaving methods based on various auxiliary microstructures: (1) etched transverse auxiliary lines of various widths (from 5 to 100 μm) and positions; and (2) etched dashed auxiliary lines. The interplay between the auxiliary lines and the etching process is analyzed for dense periodic and isolated trenches sized from 2 to 50 μm with an aspect ratio of more than 10. We experimentally showed that an incorrect choice of auxiliary line parameters leads to silicon "build-up" defects at target microstructures intersections, which significantly affects the cross-section profile metrology. Finally, we suggest a highly controllable defect-free cross-section cleaving method utilizing dashed auxiliary lines with the stress concentrators. [ABSTRACT FROM AUTHOR]

This study aims at developing a miniaturized CMOS integrated silicon-based microfluidic system, compatible with a standard CMOS process, to enable the characterization, and separation of live and dead yeast cells (as model bio-particle organisms) in a cell mixture using the DEP technique. DEP offers excellent benefits in terms of cost, operational power, and especially easy electrode integration with the CMOS architecture, and requiring label-free sample preparation. This can increase the likeliness of using DEP in practical settings. In this work the DEP force was generated using an interdigitated electrode arrays (IDEs) placed on the bottom of a CMOS-based silicon microfluidic channel. This system was primarily used for the immobilization of yeast cells using DEP. This study validated the system for cell separation applications based on the distinct responses of live and dead cells and their surrounding media. The findings confirmed the device's capability for efficient, rapid and selective cell separation. The viability of this CMOS embedded microfluidic for dielectrophoretic cell manipulation applications and compatibility of the dielectrophoretic structure with CMOS production line and electronics, enabling its future commercially mass production. [ABSTRACT FROM AUTHOR]

Over decades, fiber-optic temperature sensors based on conventional single-mode fibers (SMF) have been demonstrated with either high linearity and stability in a limited temperature region or poor linearity and thermal hysteresis in a high-temperature measurement range. For high-temperature measurements, isothermal annealing is typically necessary for the fiber-optic sensors, aiming at releasing the residual stress, eliminating the thermal hysteresis and, thus, improving the high-temperature measurement linearity and stability. In this article, an annealing-free fiber-optic high-temperature (1100 °C) sensor based on a diaphragm-free hollow-core fiber (HCF) Fabry-Perot interferometer (FPI) is proposed and experimentally demonstrated. The proposed sensor exhibits an excellent thermal stability and linearity (R2 > 0.99 in a 100–1100 °C range) without the need for high-temperature annealing. The proposed sensor is extremely simple in preparation, and the annealing-free property can reduce the cost of sensor production significantly, which is promising in mass production and industry applications. [ABSTRACT FROM AUTHOR]

For mass production of liposomes, we designed a plastic micro-channel device on the basis of 5 μm of micro-nozzle array forming T-junction with 100 μm depth of micro-channel. A micro-channel unit for synthesizing liposomes consisted of two micro-nozzle arrays for mixing two solutions as well as delivery and recovery channels for supplying solutions and collecting liposome suspension. The number of micro-nozzles was approximately 2400 for a micro-channel unit, and seven units were applied independently on a micro-channel plate. The plastic micro-channel plate was injection-molded for mass production using a micro-channel stamper previously fabricated by UV lithography and nickel electroforming process. A plastic cover plate with seven pairs of inlet and outlet ports was machined by mechanical milling and drilling and was assembled with a micro-channel plate using a holder to form a liposome synthesizing device. Flow and mixing of solutions in the micro-channels were tested using colored water to check the micro-fluidic characteristics of the device. Finally, a L-α-phosphatidylcholine (SOY PC) liposome was synthesized using EtOH solution of SOY PC (95%) and saline (0.85% NaOH solution) to find that the liposomes were around 230 and 260 nm in diameter, depending on the flow rate of the lipid solution. [ABSTRACT FROM AUTHOR]

Metal nanoparticles are typically prepared by using a chemical method, and a suspension is added to control the particle size and concentration of the nanoparticles. In this study, a micro-electric discharge machine (micro-EDM) was used to melt bismuth into nanoparticles, thus yielding a colloidal solution. No chemicals were added during the manufacturing process, and pure water was used as the medium. The colloid was assessed using an electrohydraulic system, and process parameters were adjusted for optimization; additionally, the discharge pulse wave was analyzed. The proposed preparation process is simple, fast, and cost-effective; moreover, the manufacturing process allows for mass production and reduces environmental pollution. Experimental results revealed that the nano-bismuth (nano-bi) colloidal solution was successfully prepared by the micro-EDM, and absorption peaks in the UV-vis spectrum were observed at 234 and 237 nm. Moreover, to optimize the proportional–integral–derivative (PID) control parameters to be used in the micro-EDM to prepare the nano-bi colloidal solution, this study derived a mathematical model of the micro-EDM. MATLAB was used to obtain the PID parameters. The discharge success rate (74.1876%) for the nano-bi colloidal solution prepared using our method was higher than that (46.9196%) obtained for a nano-bi colloidal solution prepared using an online adaptation method. [ABSTRACT FROM AUTHOR]

Research and industrial studies have indicated that small size, low cost, high precision, and ease of integration are vital features that characterize microelectromechanical systems (MEMS) inertial sensors for mass production and diverse applications. In recent times, sensors like MEMS accelerometers and MEMS gyroscopes have been sought in an increased application range such as medical devices for health care to defense and military weapons. An important limitation of MEMS inertial sensors is repeatedly documented as the ease of being influenced by environmental noise from random sources, along with mechanical and electronic artifacts in the underlying systems, and other random noise. Thus, random error processing is essential for proper elimination of artifact signals and improvement of the accuracy and reliability from such sensors. In this paper, a systematic review is carried out by investigating different random error signal processing models that have been recently developed for MEMS inertial sensor precision improvement. For this purpose, an in-depth literature search was performed on several databases viz., Web of Science, IEEE Xplore, Science Direct, and Association for Computing Machinery Digital Library. Forty-nine representative papers that focused on the processing of signals from MEMS accelerometers, MEMS gyroscopes, and MEMS inertial measuring units, published in journal or conference formats, and indexed on the databases within the last 10 years, were downloaded and carefully reviewed. From this literature overview, 30 mainstream algorithms were extracted and categorized into seven groups, which were analyzed to present the contributions, strengths, and weaknesses of the literature. Additionally, a summary of the models developed in the studies was presented, along with their working principles viz., application domain, and the conclusions made in the studies. Finally, the development trend of MEMS inertial sensor technology and its application prospects were presented. [ABSTRACT FROM AUTHOR]

Hydrogel microbeads hold great promise for immune-protective cell transplants and in vitro studies. Millifluidic generation of hydrogel microbeads is a highly efficient and reproducible approach enabling a mass production. This paper illustrates the preparation and characterization of highly controlled and reproducible microbeads made by different types of hydrogel using millifluidic approaches. The optimization of the process was made by a design of experiments (DoE) approach. The microbeads' large-scale production can be potentially used for single cells or clusters encapsulation. [ABSTRACT FROM AUTHOR]

Microcapsules are attractive core-shell configurations for studies of controlled release, biomolecular sensing, artificial microbial environments, and spherical film buckling. However, the production of microcapsules with ultra-thin shells remains a challenge. Here we develop a simple and practical osmolarity-controlled swelling method for the mass production of monodisperse microcapsules with ultra-thin shells via water-in-oil-in-water (W/O/W) double-emulsion drops templating. The size and shell thickness of the double-emulsion drops are precisely tuned by changing the osmotic pressure between the inner cores and the suspending medium, indicating the practicability and effectiveness of this swelling method in tuning the shell thickness of double-emulsion drops and the resultant microcapsules. This method enables the production of microcapsules even with an ultra-thin shell less than hundreds of nanometers, which overcomes the difficulty in producing ultra-thin-shell microcapsules using the classic microfluidic emulsion technologies. In addition, the ultra-thin-shell microcapsules can maintain their intact spherical shape for up to 1 year without rupturing in our long-term observation. We believe that the osmolarity-controlled swelling method will be useful in generating ultra-thin-shell polydimethylsiloxane (PDMS) microcapsules for long-term encapsulation, and for thin film folding, buckling and rupturing investigation. [ABSTRACT FROM AUTHOR]

Micro-injection moulding (µ-IM) is a fabrication method that is used to produce miniature parts on a mass production scale. This work investigates how the process parameter settings result in adiabatic heating from gas trapped and rapidly compressed within the mould cavity. The heating of the resident air can result in the diesel effect within the cavity and this can degrade the polymer part in production and lead to damage of the mould. The study uses Autodesk Moldflow to simulate the process and identify accurate boundary conditions to be used in a gas law model to generate an informed prediction of temperatures within the moulding cavity. The results are then compared to physical experiments using the same processing parameters. Findings from the study show that without venting extreme temperature conditions can be present during the filling stage of the process and that venting solutions should be considered when using µ-IM. [ABSTRACT FROM AUTHOR]

Microsystems are key enabling technologies, with applications found in almost every industrial field, including in vitro diagnostic, energy harvesting, automotive, telecommunication, drug screening, etc. Microsystems, such as microsensors and actuators, are typically made up of components below 1000 microns in size that can be manufactured at low unit cost through mass-production. Yet, their development for commercial or educational purposes has typically been limited to specialized laboratories in upper-income countries due to the initial investment costs associated with the microfabrication equipment and processes. However, recent technological advances have enabled the development of low-cost microfabrication tools. In this paper, we describe a range of low-cost approaches and equipment (below £1000), developed or adapted and implemented in our laboratories. We describe processes including photolithography, micromilling, 3D printing, xurography and screen-printing used for the microfabrication of structural and functional materials. The processes that can be used to shape a range of materials with sub-millimetre feature sizes are demonstrated here in the context of lab-on-chips, but they can be adapted for other applications. We anticipate that this paper, which will enable researchers to build a low-cost microfabrication toolbox in a wide range of settings, will spark a new interest in microsystems. [ABSTRACT FROM AUTHOR]

Microinjection moulding has been developed to fulfil the needs of mass production of micro components in different fields. A challenge of this technology lies in the downscaling of micro components, which leads to faster solidification of the polymeric material and a narrower process window. Moreover, the small cavity dimensions represent a limit for process monitoring due to the inability to install in-cavity sensors. Therefore, new solutions must be found. In this study, the downscaling effect was investigated by means of three spiral geometries with different cross sections, considering the achievable flow length as a response variable. Process indicators, called "process fingerprints", were defined to monitor the process in-line. In the first stage, a relationship between the achievable flow length and the process parameters, as well as between the process fingerprints and the process parameters, was established. Subsequently, a correlation analysis was carried out to find the process indicators that are mostly related to the achievable flow length. [ABSTRACT FROM AUTHOR]

Precise micro-grinding machining was proposed to fabricate regular and controllable micro-grooved array structures on the surface of mold cores to realize the mass production and manufacturing of micro-structured polymer components by micro injection molding in this paper. First, the 3D topographies and section profiles of micro-ground mold cores and micro-formed polymers with different micro-structure parameters were presented. Then, the surface roughness of mold cores and polymers were compared. Next, the relationships between machining accuracy of mold core ground by micro-grinding and filling rates of micro-structured polymer formed by micro injection molding were investigated. Finally, the influences of micro injection molding parameters on the filling rate of micro-structures polymer were investigated. It is shown that the micro-structured polymer can be effectively and rapidly fabricated using the proposed method. The experimental results indicate the highest form accuracy of the micro-grooved mold core and the filling rate of micro-structured polymer can reach to 4.05 µm and 99.30%, respectively. It is found that the filling rate of the micro-structured polymer roughly increased with increasing machining accuracy of the mold core. The injection pressure had the greatest influence on the filling rate of the injection formed polymer, while the melt temperature had the least influence. [ABSTRACT FROM AUTHOR]

Modern design-conscious products have raised the development of advanced electronic fabricating technologies. These widely used industrial technologies show high compatibility for inorganic materials and capacity for mass production. However, the morphology accuracy is hard to ensure and cracks happen easily, which could cause the degradation of device performance and life span. In order to make high precision 3D conformable electronics, a thermal phase-changing adhesion interlayer and modified fabricating processes are used in self-developed equipment. The working principles and influencing factors such as heating time and geometry parameters are studied quantitatively. The accuracy of fabricated patterns is enhanced by this new technology and serpentine designed structures. The delamination or detachment are significantly alleviated. Due to the operation convenience and compatibility with existing materials, the presented fabrication method has great potential for mass production of 3D curved conformable electronics. [ABSTRACT FROM AUTHOR]

Laser micromachining has emerged as a promising technique for mass production of microfluidic devices. However, control and optimization of process parameters, and design of substrate materials are still ongoing challenges for the widespread application of laser micromachining. This article reports a systematic study on the effect of laser system parameters and thermo-physical properties of substrate materials on laser micromachining. Three dimensional transient heat conduction equation with a Gaussian laser heat source was solved using finite element based Multiphysics software COMSOL 5.2a. Large heat convection coefficients were used to consider the rapid phase transition of the material during the laser treatment. The depth of the laser cut was measured by removing material at a pre-set temperature. The grid independent analysis was performed for ensuring the accuracy of the model. The results show that laser power and scanning speed have a strong effect on the channel depth, while the level of focus of the laser beam contributes in determining both the depth and width of the channel. Higher thermal conductivity results deeper in cuts, in contrast the higher specific heat produces shallower channels for a given condition. These findings can help in designing and optimizing process parameters for laser micromachining of microfluidic devices. [ABSTRACT FROM AUTHOR]