1. Integrated InGaAsP MQW Mach–Zehnder modulator
- Author
-
Patrick LiKamWa, I. Shubin, Daniel A. May-Arrioja, and Paul K. L. Yu
- Subjects
Materials science ,Optics ,Fabrication ,business.industry ,Photonic integrated circuit ,General Engineering ,Electro-optic modulator ,Linearity ,Insertion loss ,Diffusion (business) ,Photonics ,business ,Optical switch - Abstract
We demonstrate the use of an area selective zinc in-diffusion process as a simple and efficient technique for the fabrication of integrated photonic devices. By controlling the profile of the diffusion front and the zinc depth the insertion losses of the devices can be minimized. Using this technique an integrated 1x2 Mach-Zehnder analog modulator was fabricated. Our experimental results demonstrate that the modulator exhibits excellent linearity for both TE and TM polarizations over a wavelength range of 40nm. The measured on-chip losses in the order of 3dB are obtained, which is significantly lower compared to the use of isolation trenches.
- Published
- 2008