13 results on '"Xie, Qi"'
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2. TaCN growth with PDMAT and H 2/Ar plasma by plasma enhanced atomic layer deposition
3. Annealing effect on the metal gate effective work function modulation for the Al/TiN/SiO 2/p-Si structure
4. The effect of sputtered W-based carbide diffusion barriers on the thermal stability and void formation in copper thin films
5. Patterned ZnO nanorods network transistor fabricated by low-temperature hydrothermal process
6. Diffusion barrier properties of TaN x films prepared by plasma enhanced atomic layer deposition from PDMAT with N 2 or NH 3 plasma
7. Study of ultrathin vanadium nitride as diffusion barrier for copper interconnect
8. TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
9. Annealing effect on the metal gate effective work function modulation for the Al/TiN/SiO2/p-Si structure
10. Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
11. TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
12. Diffusion barrier properties of TaN x films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
13. Annealing effect on the metal gate effective work function modulation for the Al/TiN/SiO2/p-Si structure
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