5 results on '"Vandeweyer, T."'
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2. Spacer defined FinFET: Active area patterning of sub-20 nm fins with high density
3. Advanced Cu interconnects using air gaps
4. Challenges in using optical lithography for the building of a 22nm node 6T-SRAM cell
5. Spacer defined FinFET: Active area patterning of sub-20nm fins with high density
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