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Your search keyword '"Travaly, Y."' showing total 19 results

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19 results on '"Travaly, Y."'

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13. Variation in process conditions of porogen-based low-k films: A method to improve performance without changing existing process steps in a sub-100nm Cu damascene integration route

15. Materials characterization of WNxCy, WNx and WCx films for advanced barriers

17. Impact of material/process interactions on the properties of a porous CVD-O3 low-k dielectric film

18. Impact of material/process interactions on the properties of a porous CVD-O3 low-k dielectric film

19. Materials characterization of WN x C y , WN x and WC x films for advanced barriers

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