11 results on '"Shamiryan, D."'
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2. In-line control of Si loss after post ion implantation strip
3. Effect of top power on a low- k film during oxygen strip in a TCP etch chamber
4. Dry etching process for bulk finFET manufacturing
5. Oxygen chemiluminescence in He plasma as a method for plasma damage evaluation
6. Spacer defined FinFET: Active area patterning of sub-20 nm fins with high density
7. Simulations of diffusion barrier deposition on porous low- k films
8. Pinhole density measurements of barriers deposited on low- k films
9. Comparative study of PECVD SiOCH low-k films obtained at different deposition conditions
10. Investigation of barrier and slurry effects on the galvanic corrosion of copper
11. Spacer defined FinFET: Active area patterning of sub-20nm fins with high density
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