Author: "Gravey, V." / Journal: microelectronic engineering - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "Gravey, V." Journal microelectronic engineering

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1. Barrier and seed repair performance of thin RuTa films for Cu interconnects

Author: Volders, H., Carbonell, L., Heylen, N., Kellens, K., Zhao, C., Marrant, K., Faelens, G., Conard, T., Parmentier, B., Steenbergen, J., Peer, M. Van de, Wilson, C.J., Sleeckx, E., Beyer, G.P., Tőkei, Zs., Gravey, V., Shah, K., and Cockburn, A.
Published: 2011
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