Author: "Kawada, Hiroki" / Journal: metrology, inspection, and process control for microlithography xxiv - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Kawada, Hiroki"' showing total 4 results

Start Over Author "Kawada, Hiroki" Journal metrology, inspection, and process control for microlithography xxiv

4 results on '"Kawada, Hiroki"'

1. Evaluation of 25-nm pitch SiO 2 /Si multilayer grating reference using CD-SEM

Author: Kawada, Hiroki, primary, Nakayama, Yoshinori, additional, and Yamamoto, Jiro, additional
Published: 2010
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2. Sub-nanometer calibration of CD-SEM line width by using STEM

Author: Takamasu, Kiyoshi, primary, Kuwabara, Kazuki, additional, Takahashi, Satoru, additional, Mizuno, Takeshi, additional, and Kawada, Hiroki, additional
Published: 2010
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3. Calibration of 25-nm pitch grating reference by high-resolution grazing incidence x-ray diffraction

Author: Ito, Yoshiyasu, primary, Omote, Kazuhiko, additional, Okazaki, Yuko, additional, Nakayama, Yoshinori, additional, and Kawada, Hiroki, additional
Published: 2010
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4. Improved recipe quality control: from development to mass production

Author: Nakata, Yukari, primary, Koshihara, Shunsuke, additional, Kawada, Hiroki, additional, Yang, Kyoungmo, additional, Kakuta, Junichi, additional, and Kono, Akemi, additional
Published: 2010
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