Author: "Lee, Jaewon" / Journal: materials science in semiconductor processing / Publication Year Range: Last 3 years - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Lee, Jaewon"' showing total 3 results

Start Over Author "Lee, Jaewon" Publication Year Range Last 3 years Journal materials science in semiconductor processing

3 results on '"Lee, Jaewon"'

1. Improvement of oxide chemical mechanical polishing performance by increasing Ce3+/Ce4+ ratio in ceria slurry via hydrogen reduction

Author: Lee, Jaewon, Kim, Eungchul, Bae, Chulwoo, Seok, Hyunho, Cho, Jinil, Aydin, Kubra, and Kim, Taesung
Published: 2023
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2. Tangential flow filtration of ceria slurry: Application of a single-pass method to improve buff cleaning

Author: Lee, Jaewon, Seo, Hyeonmin, Park, Sang-Hyeon, Kim, Eungchul, Lee, Jungryul, Liu, Pengzhan, Jeon, Sanghuck, Hong, Seokjun, and Kim, Taesung
Published: 2022
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3. Development of a novel wet cleaning solution for Post-CMP SiO2 and Si3N4 films

Author: Song, Junghwan, primary, Park, Kihong, additional, Jeon, Sanghuck, additional, Lee, Jaewon, additional, and Kim, Taesung, additional
Published: 2022
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