1. A waterless cleaning method of the Cu foil for CVD graphene growth
- Author
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Yuling Liang, Yanping Sui, Yanhui Zhang, Shike Hu, Guanghui Yu, Z.Y. Chen, and Xiaoming Ge
- Subjects
Materials science ,Graphene ,Annealing (metallurgy) ,Mechanical Engineering ,Metallurgy ,chemistry.chemical_element ,02 engineering and technology ,Chemical vapor deposition ,010402 general chemistry ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,Environmentally friendly ,Oxygen ,0104 chemical sciences ,law.invention ,chemistry ,Mechanics of Materials ,law ,Reagent ,General Materials Science ,Surface layer ,0210 nano-technology ,FOIL method - Abstract
A waterless cleaning method of Cu foil for chemical vapor deposition (CVD) graphene growth is proposed in this work. In our method, the Cu foil is first annealed in high temperature air and then cooled rapidly, contaminated Cu surface layer was oxided in annealing and separated in the following cooling process, so as to get a clean Cu surface, the whole process does not require the participation of water and other reagents. Due to the influence of oxygen, the density of graphene domains on the waterless cleaning substrate is even lower than that on the polished substrate. Waterless cleaning provides a simple, economical and environment friendly.
- Published
- 2018
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