21 results on '"Wallrabe Ulrike"'
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2. X-Ray Masks for LIGA Microfabrication.
3. Introduction: LIGA and Its Applications.
4. Polymer Optics and Optical MEMS.
5. Microinjection Molding Machines.
6. Exposure and Development Simulation for Deep X-Ray LIGA.
7. Refractive X-Ray Lenses Produced by X-Ray Lithography.
8. PTFE Photo-Fabrication by Synchrotron Radiation.
9. Front Matter.
10. Evolution of the Microspectrometer.
11. Hot Embossing of LIGA Microstructures.
12. Application of Inspection Devices.
13. Index.
14. The Micro Harmonic Drive Gear.
15. Dramatic Downsizing of Soft X-Ray Synchrotron Light Source from Compact to Tabletop.
16. Innovative Exposure Techniques for 3D Microfabrication.
17. Commercialization of LIGA.
18. Filled Resist Systems.
19. Design for LIGA and Safe Manufacturing.
20. RF Applications.
21. Development of Microfluidic Devices Created via the LIGA Process.
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