1. Influence of silver incorporation on chemical bonding in plasma polymerized hemamethyldisiloxane based metal/polymer nanocomposite films.
- Author
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Izai, Vitalii, Fiantok, Tomáš, Roch, Tomáš, Nagy, Štefan, Pop, M., Kúš, Peter, and Mikula, Marian
- Subjects
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NANOCOMPOSITE materials , *CHEMICAL bonds , *X-ray diffraction , *TRANSMISSION electron microscopy , *PARTIAL pressure - Abstract
Silver-containing nanocomposite thin-films were deposited using the High Target Utilization Sputtering technique (HiTUS) by simultaneous sputtering of Ag target and polymerization of hexamethyldisiloxane (HMDSO) vapors in radiofrequency plasma. The presence of silver in form of nanoclusters was confirmed by X-ray diffraction and transmission electron microscopy. The silver content in the films under investigation decreases with increasing HMDSO monomer partial pressure. Addition of silver leads to a steep decrease of organosilicon polymer density, decrease of bonded carbon content and increase of oxygen content bonded in silanol groups (SiOH). The increase of silver content leads to more intensive fragmentation of polymer chains and changes the Si-O-Si backbone of polymer matrix from suboxide structure typical for organosilicon polymers towards nanoporous inorganic silicon oxide cage structure. Silver incorporation changes the plasma polymerized HMDSO the same way as transition from “soft” to “hard” plasma conditions. [ABSTRACT FROM AUTHOR]
- Published
- 2022