Author: "Thywissen, J." / Journal: journal of vacuum science & technology b: microelectronics and nanometer structures - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Thywissen, J."' showing total 3 results

Start Over Author "Thywissen, J." Journal journal of vacuum science & technology b: microelectronics and nanometer structures

3 results on '"Thywissen, J."'

1. Using neutral atoms and standing light waves to form a calibration artifact for length metrology

Author: Thywissen, J. H., primary
Published: 1998
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2. Metastable-atom-activated growth of an ultrathin carbonaceous resist for reactive ion etching of SiO[sub 2] and Si[sub 3]N[sub 4]

Author: Thywissen, J. H., primary
Published: 1998
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3. Nanofabrication using neutral atomic beams

Author: Thywissen, J. H., primary
Published: 1997
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