Author: "Shamiryan, D." / Journal: journal of vacuum science & technology b: microelectronics and nanometer structures - Searchworks@Jio Institute Digital Library Search Results

Searchworks

Select search scope, currently: Articles

Catalog

books, media & more in Jio Institute collections

Articles

journal articles & other e-resources

Your search keyword '"Shamiryan, D."' showing total 3 results

Start Over Author "Shamiryan, D." Journal journal of vacuum science & technology b: microelectronics and nanometer structures

3 results on '"Shamiryan, D."'

1. Influence of crystallographic orientation on dry etch properties of TiN

Author: Dictus, D., primary, Shamiryan, D., additional, Paraschiv, V., additional, Boullart, W., additional, De Gendt, S., additional, and Vanhaelemeersch, S., additional
Published: 2006
Full Text: View/download PDF

2. Comparative study of SiOCH low-k films with varied porosity interacting with etching and cleaning plasma

Author: Shamiryan, D., primary, Baklanov, M. R., additional, Vanhaelemeersch, S., additional, and Maex, K., additional
Published: 2002
Full Text: View/download PDF

3. Characterization of Cu surface cleaning by hydrogen plasma

Author: Baklanov, M. R., primary, Shamiryan, D. G., additional, Tökei, Zs., additional, Beyer, G. P., additional, Conard, T., additional, Vanhaelemeersch, S., additional, and Maex, K., additional
Published: 2001
Full Text: View/download PDF

Catalog

Books, media, physical & digital resources

See catalog results