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Start Over Author "Gravey, V." Journal journal of vacuum science & technology a: vacuum, surfaces, and films
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1. Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications

Author

Swerts, J., primary, Armini, S., additional, Carbonell, L., additional, Delabie, A., additional, Franquet, A., additional, Mertens, S., additional, Popovici, M., additional, Schaekers, M., additional, Witters, T., additional, Tökei, Z., additional, Beyer, G., additional, Van Elshocht, S., additional, Gravey, V., additional, Cockburn, A., additional, Shah, K., additional, and Aubuchon, J., additional

Published
2012
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