Author: "Cheong, Hee-Woon" / Journal: journal of the korean physical society - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "Cheong, Hee-Woon" Journal journal of the korean physical society

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1. F and O radicals and ion energy distribution in etching of silicon via hole in a weakly-magnetized, inductively-coupled SF6/O2 plasma

Author: Kim, Wan-Soo, Lee, WooHyun, Cheong, Hee-Woon, Kim, JiWon, Park, WanJae, and Whang, Ki-Woong
Published: 2014
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