5 results on '"Shamiryan, D."'
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2. Effects of He Plasma Pretreatment on Low-k Damage during Cu Surface Cleaning with NH[sub 3] Plasma
3. Using Ellipsometry for Assessment of TiN Surface Roughness after Plasma Etch
4. Effects of He Plasma Pretreatment on Low-k Damage during Cu Surface Cleaning with NH3 Plasma.
5. Effects of He Plasma Pretreatment on Low-kDamage during Cu Surface Cleaning with NH3Plasma
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