Author: "He, Yongyong" / Journal: journal of the electrochemical society - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"He, Yongyong"' showing total 3 results

Start Over Author "He, Yongyong" Journal journal of the electrochemical society

3 results on '"He, Yongyong"'

1. Effects of the Polishing Variables on the Wafer-Pad Interfacial Fluid Pressure in Chemical Mechanical Polishing of 12-Inch Wafer

Author: Zhao, Dewen, primary, He, Yongyong, additional, Wang, Tongqing, additional, Lu, Xinchun, additional, and Luo, Jianbin, additional
Published: 2012
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2. In Situ Measurement of Fluid Pressure at the Wafer-Pad Interface during Chemical Mechanical Polishing of 12-inch Wafer

Author: Zhao, Dewen, primary, He, Yongyong, additional, and Lu, Xinchun, additional
Published: 2011
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3. Modeling the Chemical-Mechanical Synergy during Copper CMP

Author: Li, Jing, primary, Lu, Xinchun, additional, He, Yongyong, additional, and Luo, Jianbin, additional
Published: 2011
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