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Abstract: The effects of mechanical alloying (MA) conditions on oxygen contamination were investigated to establish the manufacturing technology of oxygen-controlled oxide dispersion strengthened (ODS) martensitic steel. High-temperature mechanical tests and microstructure observations were performed in oxygen-and-titanium-controlled steels in order to demonstrate high-temperature strength improvement using oxygen control. Oxygen content was drastically reduced by the purification of MA atmosphere, Ar gas. It was shown that the lower speed agitation at the beginning of MA was effective for the reduction of oxygen contamination because oxygen was mixed mainly at the beginning of mechanical alloying due to the imperfect replacement of Ar gas. Dense distribution of oxide particle and significant improvement in high-temperature strength were achieved by applying 99.9999wt% Ar in MA atmosphere and reducing oxygen contents. It was revealed that the merely increasing Y2O3 and titanium addition cannot improve the high-temperature strength. The excess oxygen is an important parameter for making oxide particles finely and densely distributed as well as improving high-temperature strength. [Copyright &y& Elsevier]