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Start Over Author "Chit Yiu Chan" Journal journal of physical chemistry b
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1. Studying the growth of cubic boron nitride on amorphous tetrahedral carbon interlayers

Author

Kar Man Leung, Chit Yiu Chan, Yat Ming Chong, Yuen Yao, Kwok Leung Ma, Igor Bello, Wen Jun Zhang, and Shuit Tong Lee

Subjects
Boron nitride -- Structure, Boron nitride -- Properties, Boron nitride -- Electric properties, Electrophoretic deposition -- Analysis, Dielectric films -- Structure, Dielectric films -- Properties, Dielectric films -- Electric properties, Thin films -- Structure, Thin films -- Properties, Thin films -- Electric properties, Chemicals, plastics and rubber industries
Abstract

The growth of cubic boron nitride (cBN) films on bare silicon and amorphous tetrahedral carbon layers prepared on silicon substrates was studied. The cBN films were prepared by radio frequency magnetron sputter deposition at approximately 870 degree Celsius.

Published
2005

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