1. Migration behavior of alkali and alkaline-earth cations in soda-lime silicate glass surface by electrical nanoimprint
- Author
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Toshio Suzuki, Sadatatsu Ikeda, Junji Nishii, Keiichiro Uraji, and Kiyoshi Yamamoto
- Subjects
010302 applied physics ,Alkaline earth metal ,Fabrication ,Materials science ,Mineralogy ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Alkali metal ,01 natural sciences ,Electronic, Optical and Magnetic Materials ,chemistry.chemical_compound ,Soda lime ,chemistry ,Chemical engineering ,Transmission electron microscopy ,0103 physical sciences ,Materials Chemistry ,Ceramics and Composites ,0210 nano-technology ,Spectroscopy ,Glass transition ,Layer (electronics) - Abstract
One dimensional pattern of 500 nm period was formed on a soda-lime silicate glass by the electrical nanoimprint below the glass transition temperature. The imprinted glass surface was analyzed using a transmission electron microscopy and an energy-dispersive X-ray spectroscopy with the cryogenic system. The concentrated parabolic layers of Ca 2 + and Mg 2 + were formed separately in the Na + deficient layer. The deficient area both of such alkali and alkaline-earth cations was preferentially removed in an alkali etchant, resulting the enhancement of the aspect ratio of the one-dimensional relief pattern. Therefore, the distribution control of alkaline-earth cations was important for the fabrication of sub-micron scale patterns with high aspect ratio on the glass surface.
- Published
- 2016
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