Search

Your search keyword '"Tobias Pahl"' showing total 1 results
Start Over Author "Tobias Pahl" Journal journal of modern optics
1 results on '"Tobias Pahl"'

1. Two-dimensional modelling of systematic surface height deviations in optical interference microscopy based on rigorous near field calculation

Author

Sebastian Hagemeier, Tobias Pahl, Peter Lehmann, Weichang Xie, and Lucie Hüser

Subjects
Surface (mathematics), Materials science, Microscope, business.industry, Near and far field, Surface finish, 01 natural sciences, Atomic and Molecular Physics, and Optics, Finite element method, law.invention, 010309 optics, Optics, law, 0103 physical sciences, Microscopy, Range (statistics), 010306 general physics, business, Nanoscopic scale
Abstract

Optical interference microscopes are widespread in topography and roughness measurement on the micro- and nanoscale. In spite of a wide range of scientific and industrial applications, systematic d...

Published
2020
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results