11 results on '"Tay, Francis E. H."'
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2. Microfabricated microneedle with porous tip for drug delivery
3. Low stress PECVD—SiNxlayers at high deposition rates using high power and high frequency for MEMS applications
4. A nonlinearity compensation approach based on Delaunay triangulation to linearize the scanning field of dual-axis micromirror
5. Fabrication of a dielectrophoretic chip with 3D silicon electrodes
6. Micromechanical torsional digital-to-analog converter for open-loop angular positioning applications
7. Macro-modelling of a double-gimballed electrostatic torsional micromirror
8. Efficient design of micromechanical gyroscopes
9. Global optimization and design for microelectromechanical systems devices based on simulated annealing
10. A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels
11. Fabrication of a dielectrophoretic chip with 3D silicon electrodes
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