1. A1 Resonators in 128° Y-cut Lithium Niobate with Electromechanical Coupling of 46.4%.
- Author
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Lu, Ruochen, Yang, Yansong, Link, Steffen, and Gong, Songbin
- Subjects
RESONATORS ,QUALITY factor ,THIN films ,LITHIUM niobate ,MICROELECTROMECHANICAL systems ,PIEZOELECTRIC devices - Abstract
In this work, we present first-order antisymmetric (A1) mode resonators in 128° Y-cut lithium niobate (LiNbO3) thin films with electromechanical coupling coefficients ($k^{2}$) as large as 46.4%, exceeding the state-of-the-art. The achievable $k^{2}$ of A1 in LiNbO3 substrates of different orientations is first explored, showing X-axis direction in 128° Y-cut LiNbO3 among the optimal combinations. Subsequently, A1 resonators with spurious mode mitigation are designed and fabricated. In addition to the large $k^{2}$ , the implemented devices show a maximum quality factor ($Q$) of 598 at 3.2 GHz. Upon further optimization, the reported platform can potentially deliver a wideband acoustic-only filtering solution in 5G New Radio. [2020–0003] [ABSTRACT FROM AUTHOR]
- Published
- 2020
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