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Start Over Author "Briche S" Journal journal of materials science
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3. New insights in photo-patterned sol-gel-derived TiO films.

Author

Briche, S., Tebby, Z., Riassetto, D., Messaoud, M., Gamet, E., Pernot, E., Roussel, H., Dellea, O., Jourlin, Y., and Langlet, M.

Subjects
*FOURIER transform infrared spectroscopy, *ELLIPSOMETRY, *X-ray diffraction, *TITANIUM dioxide films, *PHOTOCATALYSIS, *LITHOGRAPHY
Abstract

Specific sol-gel formulations and protocols have been adapted to the fine patterning of TiO films using a very simplified UVA three-step lithography method. Mechanisms occurring during the photo-patterning procedure and a post-patterning thermal treatment have been studied by Fourier transform infrared spectroscopy, atomic force microscopy, X-ray diffraction, and ellipsometry. Discussions are proposed to support the influence of the photo-patterning procedure and post-patterning treatment on the shape and the dimension of so-formed microstructures. Original additional functionalities arising from such structures are also presented. [ABSTRACT FROM AUTHOR]

Published
2011
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