1. Synthesis of Tantalum-Doped Tin Oxide Thin Films by Magnetron Sputtering for Photovoltaic Applications
- Author
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Ngoc Minh Nguyen, Van Thanh Pham, Thanh Tu Truong, Thuat Nguyen-Tran, Van Diep Bui, Duy T. Nguyen, Minh Hieu Nguyen, and Manh Quynh Luu
- Subjects
010302 applied physics ,Materials science ,business.industry ,Band gap ,Energy conversion efficiency ,Tantalum ,chemistry.chemical_element ,02 engineering and technology ,Sputter deposition ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Tin oxide ,01 natural sciences ,Electronic, Optical and Magnetic Materials ,chemistry ,Electrical resistivity and conductivity ,0103 physical sciences ,Materials Chemistry ,Transmittance ,Optoelectronics ,Electrical and Electronic Engineering ,Thin film ,0210 nano-technology ,business - Abstract
Tantalum-doped tin oxide transparent conductive thin films were deposited on glass substrates by radio frequency and direct current reactive magnetron co-sputtering methods in an argon and oxygen environment. Optimization of the thin films for photovoltaic applications was performed using a dimensionless figure of merit by combining electrical and transparency properties. The optimized thin film showed a weight-averaged transmittance of 83%, a band gap value of 3.2 eV, resistivity of 5.2 × 10−3 Ω cm, and bulk carrier concentration of 1.2 × 1020 cm−3. The lowest resistivity among all films was 2.1 × 10−3 Ω cm, corresponding to a weight-averaged transmittance of 62%. The optimized deposition condition was carried out by co-sputtering on heated substrates at 270°C. Thin films deposited under this optimized condition were applied for our perovskite solar cells, and demonstrated promising power conversion efficiency.
- Published
- 2017
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