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The correction function of a hemispherical analyzer (HSA) is determined for quantitative interpretations of electron spectroscopy. In this way, electron elastic images are performed using a scanning electron gun. This new method allowed the determination of the analysis area A(EK) of a HSA for the first time. An important result is the dependence of this analysis area on the electron kinetic energy EK. Indeed, results show that A(EK) varies as EK−1.2 regardless of the spectrometer configuration. This parameter is different from the so-called transmission function and must be taken into account for quantitative interpretation. Moreover, the transmission function T(EK) is also determined in this work and varies as a power function EKx where x is a fitting parameter which depends only on the width in the energy dispersive direction of the hemisphere entrance slit. These two apparatus functions are then validated thanks to XPS measurements by comparing results obtained on two different Ag surfaces. Then a general methodology to use these functions is given.

The interaction of H 2 and H + with InP(100) surfaces was studied by AES, EELS and EPES (elastic peak electron spectroscopy) supply more information than AES (Auger electron spectroscopy) alone. EPES measures the intensity of the elastic peak; the signal magnitude is determined by the elastic scattering cross section and the inelastic mean free path. Dramatic changes in the EPES spectra were observed on InP(100) surface cleaned by Ar + ion bombardment and then exposed to 70 L H 2 . For the evaluations of the EPES spectra, effective elastic scattering cross sections for a monolayer of H, C. P and In atoms were calculated for electron energies between E=50 and 300 eV range. AES and EPES spectra indicated enrichment of P in the surface layer, heating the ion etched sample to 473 K and exposing it to H 2 resulted in the formation of a P monolayer on the surface, while the bombardment of the surface with H + ions produced depletion of P in the surface layer. No experimental evidence was found using EELS (electron energy loss spectroscopy) and EPES for adsorption of H on the InP(100) surface.