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Studies of implant activation in InAs have not been reported presumably because of challenges associated with junction leakage. The activation of 20 keV, Si+ implants into lightly doped (001) p-type bulk InAs performed at 100 °C as a function of annealing time and temperature was measured via Raman scattering. Peak shift of the L+ coupled phonon-plasmon mode after annealing at 700 °C shows that active n-type doping levels ≈5×1019cm–3 are possible for ion implanted Si in InAs. These values are comparable to the highest reported active carrier concentrations of 8–12×1019cm–3 for growth-doped n-InAs. Raman scattering is shown to be a viable, non-contact technique to measure active carrier concentration in instances where contact–based methods such as Hall effect produce erroneous measurements or junction leakage prevents the measurement of shallow n+ layers, which cannot be effectively isolated from the bulk. [ABSTRACT FROM AUTHOR]

In this paper, we report the systematic investigation on the melt characteristics of silicon during laser thermal processing (LTP) of amorphous silicon (a-Si) gates on ultrathin gate oxides. LTP is used to reduce the gate depletion effect in advanced semiconductor devices. The influence of implantation-induced damage and chemical inhomogeneities on the melt behavior of ion-implanted a-Si is studied using in situ time-resolved reflectance (TRR) measurements and ex situ secondary ion mass spectrometry. The results from TRR measurements indicate the presence of a buried melt for a-Si implanted with B+ at a subamorphizing dose. In contrast, such a melt behavior is not observed during LTP of undoped a-Si and a-Si implanted with As+ at an amorphizing dose. We attribute the marked difference in the melt characteristics to the competitive effects between compositional inhomogeneities and the extent of amorphization in the a-Si layer. It should be noted that the as-deposited a-Si gate is not really “amorphous” in the sense of an ion beam-induced amorphous layer. This postulation is verified by the absence of a buried melt in a-Si films implanted with Si+ prior to B+ implantation, where the dose of the Si+ implant is sufficient to cause amorphization in silicon and the amorphization depth greatly exceeds the projected range of the boron implant. © 2004 American Institute of Physics. [ABSTRACT FROM AUTHOR]

Provides information on a study which examined the non-equilibrium carbon-silicon alloys produced by laser induced epitaxy from ion implanted silicon. Epitaxial crystallization of carbon-silicon alloys; Application of pulsed laser in epitaxial crystallization; Use of transmission electron microscopy and infrared spectroscopy in analyzing carbon-silicon alloys.

Studies the infrared absorption and Raman scattering intensity of the local carbon mode in Si1-yCy alloys. Growth by direct carbon implantation followed by different recrystallization procedures; Agreement with an extrapolation of the calibration curve; Evidence for the achievement of substitutionality in laser-recrystallized films.

The effect of a thermally grown silicon nitride (SiN[sub x]) film on end-of-range extrinsic dislocation loops in a silicon substrate was investigated by transmission electron microscopy. A layer of extrinsic dislocation loops was formed by annealing a Si wafer amorphized by a Ge[sup +] ion implant. A nitride film was grown on the Si by further annealing in ammonia (NH[sub 3]) at 810 and 910 °C for 30–180 min. Wafers with a loop layer were also annealed in argon (Ar) at the same conditions as the NH[sub 3]-annealed wafers to determine loop behavior in an inert environment. Samples annealed in NH[sub 3] had a significant decrease in the net number of interstitials bound by the loops, while those annealed in Ar showed no change. The results are explained by a supersaturation of vacancies caused by the presence of the nitride film, resulting in loop dissolution. By integrating the measured vacancy flux over the distance from the nitride/Si interface to the loop layer, we extract an estimate for the relative supersaturation of vacancies at 910 °C, C[sub V]/C∗[sub V]∼4, where C[sub V] is the concentration of vacancies and the asterisk denotes equilibrium. We rule out interstitial undersaturation-induced loop dissolution based on loop stability with temperature and oxidation-enhanced loop growth calculations. A comparison with estimated C[sub V]/C∗[sub V] values from a previous report using the same processing equipment and parameters but monitoring the change in Sb diffusivity with nitridation shows excellent agreement. [ABSTRACT FROM AUTHOR]

Provides information on a study that examined the solidification of silicon-arsenic alloys induced by pulsed-laser melting at regrowth velocities where the partition coefficient is close to unity. Experimental techniques; Data analysis; Results and discussion on the study; Conclusions.