6 results on '"Shamiryan, D."'
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2. Growth and characterization of atomic layer deposited WC[sub 0.7]N[sub 0.3] on polymer films.
3. Low dielectric constant materials for microelectronics.
4. Factors affecting an efficient sealing of porous low-k dielectrics by physical vapor deposition Ta(N) thin films.
5. Growth and characterization of atomic layer deposited WC0.7N0.3 on polymer films
6. Factors affecting an efficient sealing of porous low-kdielectrics by physical vapor deposition Ta(N) thin films
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