1. Nanocrystal formation in SiC by Ge ion implantation and subsequent thermal annealing
- Author
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Ch. Schubert, G. Heß, A. Hedler, Uwe Glatzel, J. Kräußlich, K. Goetz, Tatiana Gorelik, Ute Kaiser, B. Wunderlich, and Werner Wesch
- Subjects
Materials science ,Annealing (metallurgy) ,Analytical chemistry ,General Physics and Astronomy ,chemistry.chemical_element ,Germanium ,Rutherford backscattering spectrometry ,Crystallography ,Ion implantation ,chemistry ,Nanocrystal ,Transmission electron microscopy ,Radiation damage ,Crystallite - Abstract
Ge nanocrystals were produced in 4H–SiC by implantation of 250 keV Ge+ ions with a dose of 1×1016 cm−2 and subsequent rapid thermal annealing at 1400–1600 °C. Radiation damage and Ge distribution after implantation and annealing were analyzed by Rutherford backscattering spectrometry, cross-sectional transmission electron microscopy methods, and x-ray diffraction. After ion implantation a significant amount of Ge is incorporated into the SiC lattice and Ge nanocrystallites were not found. Thermal annealing leads to a local Ge redistribution and both Ge-rich and Ge nanocrystals are detected after annealing. The size of the nanocrystals varies between 2 and 10 nm.
- Published
- 2002