1. Tutorial: Piezoelectric and magnetoelectric N/MEMS—Materials, devices, and applications.
- Author
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Will-Cole, A. R., Hassanien, Ahmed E., Calisgan, Sila Deniz, Jeong, Min-Gyo, Liang, Xianfeng, Kang, Sungho, Rajaram, Vageeswar, Martos-Repath, Isabel, Chen, Huaihao, Risso, Antea, Qian, Zhenyun, Seyed Abrishami, Seyed Mahdi, Lobandi, Nader, Rinaldi, Matteo, Gong, Songbin, and Sun, Nian X.
- Subjects
MAGNETOELECTRIC effect ,VOLTAGE ,PIEZOELECTRIC materials ,INFRARED radiation ,MAGNETIC materials ,ELECTROMECHANICAL effects ,COPLANAR waveguides - Abstract
Nano- and micro-electromechanical systems (N/MEMSs) are traditionally based on electrostatic or piezoelectric coupling, which couples electrical and mechanical energy through acoustic resonator structures. Most recently, N/MEMS devices based on magnetoelectrics are gaining much attention. Unlike electrostatic or piezoelectric N/MEMS that rely on an AC electric field or voltage excitation, magnetoelecric N/MEMS rely on the electromechanical resonance of a magnetostrictive/piezoelectric bilayer heterostructure exhibiting a strong strain-mediated magnetoelectric coupling under the excitation of a magnetic field and/or electric field. As a consequence, magnetoelectric N/MEMS enable unprecedented new applications, ranging from magnetoelectric sensors, ultra-compact magnetoelectric antennas, etc. This Tutorial will first outline the fundamental principles of piezoelectric materials, resonator design, specifically different acoustic modes, and piezoelectric-based N/MEMS applications, i.e., radio frequency front end filters and infrared radiation sensors. We will then provide an overview of magnetoelectric materials and N/MEMS focusing on the governing physics of the magnetoelectric effect, magnetic material properties for achieving high magnetoelectric coupling, state-of-the-art magnetoelectric N/MEMS devices, and their respective applications. [ABSTRACT FROM AUTHOR]
- Published
- 2022
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