1. Evaluation of tailored electrode (Ba,Sr)RuO3 for (Ba,Sr)TiO3
- Author
-
Choi, Duck-Kyun, Kim, Boum-Seock, Son, SEung-Young, Oh, Se-Hoon, and Park, Kyung-Woong
- Subjects
Dielectric devices -- Research ,Electrodes -- Evaluation ,Thin films -- Electric properties ,Physics - Abstract
Research was conducted to examine the conducting oxide electrode (Ba,Sr)RuO3 (BSR) for (Ba,Sr)TiO3 (BST). The electrode was assumed to be advantageous for BST because of its similarity in structure and chemical composition. By changing the Ba/Sr ratio or (Ba+Sr)/Ru ratio in BSR films, the effects of structural and chemical variation in BSR electrodes on the properties of BST films were investigated. Results show that the BSR electrode is the most promising one for BST dielectric material among the oxide electrodes.
- Published
- 1999