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Mixed oxide coatings consisting of varying proportions of RuO2 and TiO2 have been prepared on titanium and silica substrates. Development of the microstructure was examined by X-ray diffraction and also monitored by resistivity measurements. The X-ray results suggest that the mixed oxide coatings prepared at 400° C are best described as a metastable solid solution of the two components. The resistivity-composition relationship however is more indicative of a finely interdispersed mixture of conducting and insulating particles. Coatings fired at higher temperatures (700–800° C) exhibit separate X-ray diffraction peaks corresponding to almost pure RuO2 and TiO2 phases with no evidence of significant solid solubility.