1. Influence of Fe-doped on structural, electronic structural and optical properties of hydrogenated amorphous carbon films prepared by plasma enhanced chemical vapor deposition
- Author
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Zhang, Hongliang, Wu, Weidong, Wang, Wei, Gong, Chengshi, He, Zhibing, Zhou, Ming, Su, Qing, Tang, Yongjian, and Xie, Erqing
- Subjects
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THIN films , *OPTICAL properties , *PHOTOLUMINESCENCE , *ELECTRONIC structure , *HYDROGENATION , *CARBON , *BUTENE , *RAMAN effect , *PLASMA-enhanced chemical vapor deposition - Abstract
Abstract: Fe-doped hydrogenated amorphous carbon (a-C:H:Fe) films were deposited from an isobutene/ferrocene/H2 gas mixture by plasma enhanced chemical metal organic vapor deposition. Raman spectra were used to characterize the bonding structure of the a-C:H:Fe films and hydrogenated amorphous carbon (a-C:H) films. Optical properties were investigated by the UV–vis spectroscopy and the photoluminescence spectra. The number of six-numbered rings of the a-C:H films increases and sp 2 clustering of the films decreases after Fe-doping. The Tauc optical gap of the a-C:H:Fe films becomes narrower by 0.15–0.23eV relative to the value of the a-C:H films. The narrowing of the optical gap after doping is attributed primarily to the extended state around the Fe deep level in the band gap and the narrowing of the π and π* band edge states because of the increase of the number of six-numbered rings in the a-C:H films. Fe deep level defects of the a-C:H:Fe films contribute chiefly to non-radiative recombination. [Copyright &y& Elsevier]
- Published
- 2009
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