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Abstract The temperature dependence of phase composition and lattice parameters, for TiAl x N thin film coating, are experimentally investigated by in-situ synchrotron radiation X-ray diffraction (SR-XRD), at temperatures between 25 °C and 700 °C. Mechanical properties, such as: Young's modulus (E), hardness (H) and plastic deformation index (PDI) – were experimentally determined by nanoindentation, at 25 °C. Crystalline structural analysis, of SR-XRD results, indicates the major phases are TiN and AlN; with Ti 2 O and TiO 2 phases also present above 600 °C. The lattice constants increased with an increase in temperature. Atomic and phase compositions, at 25 °C, were also verified by X-ray photoelectron spectroscopy (XPS). Field emission scanning electron microscopy (FESEM) images display an increase in surface roughness and reduction in grain size, with increasing Aluminium percentage (Al%). Nanoindentation analysis showed a maximum hardness of 25.1 ± 1.5 GPa (sample containing 12% Al), which was subsequently reduced upon addition of more Aluminium. Finite element modelling (FEM), including von Mises stress distribution, indicates lower mechanical integrity, for samples with high Al% content. Highlights • Hardness increase upon the addition of small amounts of Aluminium doping. • Significant increase in resistance of plastic deformation with increasing doping. • High temperature in-situ analysis detected an increase in lattice parameters. • Film coatings with different doping exhibited different oxidation states. • Finite element modelling evaluated mechanical integrity of films under load. [ABSTRACT FROM AUTHOR]

Titanium-doped indium tin oxide thin films were synthesized via a sol-gel spin coating process. Surface chemical bonding states and mechanical properties have been investigated as a function of titanium content (2 and 4 at%) and annealing temperature ranging from 400 to 600 °C with increments of 100 °C. Raman analysis was performed to study the phonon vibrations for the prepared samples and the results revealed the existence of ITO vibrational modes. The elemental compositions, bonding states and binding energies of the film materials were investigated using X-ray photoelectron spectroscopy (XPS) technique. The XPS results indicated that the ratio of the metallic elements (In, Sn, Ti) to the oxygen on the surface of the thin film coatings decreased due to the increase of the oxide layer on the surface of the thin films. Also, by increasing the annealing temperature up to 600 °C, the Ti 2p and Cl 2p signals were no longer detected for both 2 and 4 at% Ti contents, respectively, due to the thicker surface oxidation layer. Mechanical properties of the synthesized films were also evaluated using a nanoindentation process. Variations in the hardness ( H ) and the elastic modulus ( E ) were observed with different Ti at% and annealing temperatures. The hardness is within the range of 6.3–6.6 GPa and 6.7–6.8 GPa for 2 and 4 at% Ti content samples, respectively, while the elastic modulus is within the ranges of 137–143 and 139–143 GPa for 2 at% and 4 at% Ti contents samples, respectively. A combination of the highest H and E were achieved in the sample of 4% Ti content annealed at 600 °C. Furthermore, the H/E ratio ranges from 4.5 × 10 −2 to 5.0 × 10 −2 which reflects a reasonable level of wear resistance. [ABSTRACT FROM AUTHOR]