15 results on '"Ono, Toshiro"'
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2. Effects of Electron-Cyclotron-Resonance Oxygen Plasma Irradiation on Properties of Insulator/Ge-Semiconductor Interfaces Prior to Germanium Nitride Formation
3. Electrical Characterization Techniques of Dielectric Thin Films Using Metal–Insulator–Metal Structures
4. Characterization of Metal Insulator Metal Electrical Properties of Electron Cyclotron Resonance Plasma Deposited Ta2O5
5. Electrical Properties of Germanium Oxynitride and Its Interface with Germanium Prepared by Electron-Cyclotron-Resonance Plasma Oxidation and Nitridation
6. Metal–Oxide–Semiconductor-Diode Characteristics with SiO2 Films Formed by Oxidation and Sputtering Using Electron-Cyclotron-Resonance-Plasma Stream
7. Al/AlN/InP Metal-Insulator-Semiconductor-Diode Characteristics with Amorphous AlN Films Deposited by Electron-Cyclotron-Resonance Sputtering
8. Low-Temperature Silicon Oxidation with Very Small Activation Energy and High-Quality Interface by Electron Cyclotron Resonance Plasma Stream Irradiation
9. Etching Characteristics of α-Type Ta Film Using Cl2 Electron Cyclotron Resonance (ECR) Plasma
10. Development of Highly Accurate X-Ray Mask with High-Density Patterns
11. High-Resolution Thick Mask Pattern Fabrication for X-Ray Lithography
12. Preparation of X-Ray Lithography Masks with Large Area Sandwich Structure Membrane
13. Electron Cyclotron Resonance Plasma Deposition Technique Using Raw Material Supply by Sputtering
14. Transparent X-Ray Lithography Masks
15. Etching Characteristics of ?-Type Ta Film Using Cl2Electron Cyclotron Resonance (ECR) Plasma
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