1. Annihilation mechanism of V-shaped pits in c-GaN grown by hydride vapor-phase epitaxy
- Author
-
Tae Mochizuki, Riki Gouda, Satoru Izumisawa, Kenji Iso, and Hirotaka Ikeda
- Subjects
Annihilation ,Materials science ,Physics and Astronomy (miscellaneous) ,Hydride ,Vapor phase ,General Engineering ,General Physics and Astronomy ,Physical chemistry ,Epitaxy ,Mechanism (sociology) - Abstract
An evident issue in performing GaN growth along the c-direction is the generation of V-shaped pits on its surface. Here, we investigated the transition of the angle of facets forming a V-shaped pit via three-photon excitation photoluminescence (3PPL). The intermittent doping of Ge was introduced to GaN growth to observe the growth front. The size of the V-shaped pit composed of { 10 1 ¯ 2 } facets decreased along the growth direction, whereas that composed of { 10 1 ¯ 1 } facets, increased. Furthermore, planar growths of c-GaN and semipolar GaN having various surface orientations revealed that the V-shaped pit composed of { 10 1 ¯ 2 } was likely to annihilate rather than that of { 10 1 ¯ 1 } under the growth condition of N2 carrier gas, which coincides with the result of 3PPL.
- Published
- 2019
- Full Text
- View/download PDF