1. Handbook of Semiconductor Silicon Technology(Book Review).
- Author
-
Wilson, Ian H.
- Subjects
SEMICONDUCTORS ,NONFICTION - Abstract
One actually needs two hands to hold this book, measuring as it does (excuse the imperial measure) 6.5" x 9.5" x 2.75" thick. Packed into the eight hundred pages are nine chapters on the materials aspects of silicon for the microelectronics industry from whence eight of the ten contributors come. Gasses fill the first two chapters--silicon precursors and polysilicon feedstocks. The next three cover crystal growth, wafers and epitaxy. Then comes four chapters concerned with material properties: crystallographic, electrical, optical, thermal, mechanical, impurities (carbon, oxygen and nitrogen), carrier lifetimes, and polysilicon. The last chapter includes fifty silicon phase diagrams. This last chapter illustrates the potential usefulness of the book as a work of reference. Nothing contained therein is startlingly new. A lot seems to have been lifted from standard textbooks and works of reference. However, here it is all together under one cover. The chapters are well supported with lists of references and I for one will keep my reviewer's copy on my shelves as a useful accumulation of data. My major criticism is with regard to the quality of the printing. It appears to have been printed on a species of toilet paper with a very frugal supply of ink (perhaps their lasers were tired). If this serves to keep the price down and preserves the rain forests, then well and good; but nowhere does it state that recycled paper was used. We can but hope. [ABSTRACT FROM AUTHOR]
- Published
- 1991
- Full Text
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