1. PREPARATION AND PROPERTIES OF LITHIUM-DOPED K0.5Na0.5NbO3 THIN FILMS BY CHEMICAL SOLUTION DEPOSITION.
- Author
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Maiwa, H., Kogure, T., Ishizaka, K., and Hayashi, T.
- Subjects
THIN films ,LITHIUM ,CHEMICAL vapor deposition ,ALKOXIDES ,SOLID state electronics - Abstract
Lithium-doped K0.5Na0.5NbO3 (KLNN) films were fabricated by chemical solution deposition on Pt/TiO2/SiO2/Si substrates. Homogeneous and stable precursor solutions were prepared by controlling the reaction of starting metal alkoxides. Perovskite KLNN single-phase thin films were successfully synthesized on Pt/TiOx/SiO2/Si substrates. The 0.75-μ m-thick KLNN film annealed at 650°C exhibited ferroelectric polarization hysteresis loops at -250°C. The loop at room temperature was round, indicating the film contained leakage components. The dielectric constant under zero bias was 490 at room temperature. A typical upside-down butterfly DC bias-capacitance curve was obtained in the KLNN film capacitors at room temperature, indicating that polarization reversal occurred in the obtained KLNN films. [ABSTRACT FROM AUTHOR]
- Published
- 2007
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