6 results on '"Uchiyama, Hiroyuki"'
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2. Reduction of plasma-induced fluorine damage to P-HEMTs using x-ray emission
3. A wavelength-tunable short-cavity DBR laser with active distributed Bragg reflector
4. Suppression of plasma-induced fluorine damage in P-HEMTs using strained InSb barrier
5. 1.3-.MU.m InGaAlAs-BH laser with Cl2/N2 ECR plasma etched mesas
6. Plasma-Induced Fluorine Damage in P-HEMT Caused by C2F6/CHF3 RIE Plasma
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