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In this paper, numerical calculations of the surface coil current and the spatial electric field in the vicinity of the antenna were investigated using wireless power transfer method. It is observed that the wirelessly transferred power to a resonant coil is dramatically changed with a variation of the excitation frequency. This result indicates that the spatial plasma distribution can be controlled through wireless resonance power transfer. This method could be applied to the large-area plasma source.

In this paper, 2-D plasma density profile is measured in an inductively coupled plasma (ICP) with changing rf power and gas pressure. As the ICP power increases at a fixed argon gas pressure of 100 mtorr, increase in the plasma density is observed at the radial edge. It could be understood by the neutral gas depletion in the discharge center and the step-ionization effect.

This work was supported in part by the SRC under Grant 2010-0029418, in part by CRC under Grant 2012K001238, and in part by the Basic Science Research Program under Grant 201300000003058 and Grant 201300000001620 through the Research Foundation of Korea, Korean Government.

A side-type inductively coupled plasma (ICP) reactor for large-area processing has been developed with the aid of ferromagnetic cores. A low-frequency operation with strong coupling to the plasma solved the problems occurring in conventional ICPs such as transmission line effect, capacitive coupling, low-power transfer efficiency, and inability to operate in a high-vacuum region. Using an auxiliary antenna, the additional electric field can be applied to the discharge center. The energy flux from the side sources toward the discharge center could be controlled by applying an additional electric field to the center using the auxiliary antenna on the quartz window. This result showed a drastic increase in the center density with a small amount of the auxiliary power and thus provided easy control of the spatial uniformity over 450 mm. An image of the ferrite ICP operated by single power is presented.

Inductively coupled plasmas have two operational modes, i.e., capacitive (E) and inductive (H). In this paper, a 2-D plasma density profile was measured with gas pressures during the E-H heating-mode transition. When the discharge is transited from the E mode to the H mode, the 2-D plasma density profile was not changed at a low gas pressure, whereas the evolution of the 2-D plasma density profile was observed at a high gas pressure. These different changes with the gas pressures on the E-H heating-mode transition originated from the transition of the electron kinetics from the nonlocal kinetics to the local kinetics.