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A physics-based TCAD model for enhanced low-dose-rate sensitivity in linear bipolar devices is developed. Quantitative agreement is found with measured data over a wide range of dose rates and H2 concentrations. Analysis of the degradation effects of individual defect types, the implementation of which has been informed by first principles calculations, provides insights into the mechanisms behind enhanced low-dose-rate effects in different hydrogen environments. The effects of initial defect concentration and location and the energetics of the defect-related reactions are explored. Conclusions are drawn about the roles of molecular hydrogen and hydrogenated defects in the radiation response of these devices. [ABSTRACT FROM PUBLISHER]

Complex interplay between hydrogen-related defect formation and passivation is observed in irradiated bipolar transistors. Hydrogen soaking experiments are performed to evaluate the dependence of defect buildup and annealing in gated lateral bipolar transistors on hydrogen exposure. Comparisons of the radiation responses of transistors tested in 2009 to identical devices from the same wafer tested in 2003 show that aging has reduced the amount of radiation-induced interface trap and oxide trapped charge formation in most cases. These results demonstrate that the way in which the radiation response of a hydrogen-sensitive device evolves with age depends on whether hydrogen is diffusing into or out of the device, and whether the initial defect concentration favors passivation or depassivation reactions. These results strongly suggest that hydrogen exposure cannot replace low-dose-rate irradiation in ELDRS tests for bipolar devices and ICs without extensive characterization testing. [ABSTRACT FROM AUTHOR]

Bipolar test structures were irradiated and annealed with various combinations of molecular hydrogen gas ambients, bias, and thermal conditions. The results show that the buildup and annealing behavior of defects in bipolar base oxides depend strongly on hydrogen concentration. Differences observed in trapped oxide charge annealing rates suggest that the charged defects created in hydrogen-rich environments may be attributed to different types of positive charge in addition to trapped holes. [ABSTRACT FROM PUBLISHER]

Radiation-induced dopant passivation is evidenced for the first time in partially-depleted SOI n-channel MOSFETs. Isochronal annealing experiments following 10 Mrad(SiO2) irradiation demonstrate that the neutralization of boron atoms in the NMOSFET body is most pronounced in the 125°C-150°C temperature range. This results in an abrupt decrease of the threshold voltage and the subthreshold swing, due to the transition of the body from partial to full depletion. The SO! four-gate transistor, inherently present in the partially-depleted MOSFET structure, is demonstrated to be a very efficient tool for monitoring dopant neutralization through irradiation and annealing. Radiation-induced dopant passivation has important consequences regarding the reliability of short-channel partially-depleted NMOSFETs. [ABSTRACT FROM AUTHOR]

We investigate the effects of both X-ray and proton irradiation on a novel 200 GHz/90 GHz (npn/pnp) complementary SiGe:C HBT technology. The dc forward mode total dose tolerance of the pnp HBTs is shown to exceed that of the npn HBTs by a significant margin after being subjected to both 63-MeV proton and 10-key X-ray sources, while the ac characteristics of both devices exhibit no degradation up to X-ray doses as high as 1.8 Mrad(SiO2). Pre- and post-irradiation results from a current feedback operational amplifier implemented in this technology and irradiated up to a dose of 1.8 Mrad(SiO2) are presented, showing no degradation in performance metrics under two low current density bias configurations. [ABSTRACT FROM AUTHOR]

The radiation tolerance of strained Si/SiGe n-MODFETs is investigated, using 10 keV X-rays, 63 MeV high energy protons, and 4 MeV low energy protons. The effects of radiation exposure on two major device design parameters (LSD and LG) in T-gate Si/SiGe n-MODFETs devices are examined. A strong dependence on source-drain spacing is observed for both the DC and RF characteristics. A drift-diffusion TCAD framework is used for 2-D device simulations. We believe that the low energy protons damage the SiGe/strained-Si/SiGe lattice, leading to partial strain relaxation. The conduction band-offset (CBO) of the strained SiGe/Si heterojunction is lowered leading to higher gate current leakage. The presence of radiation-induced bulk traps in the unrelaxed SiGe layers on the device behavior is also investigated. [ABSTRACT FROM AUTHOR]

The impact of 63.3 MeV proton and 10 keV x-ray irradiation on the DC and AC performance of complementary (npn + pnp) SiGe HBTs on thick-film SOI is investigated. Proton and x-ray induced changes in the forward and inverse Gummel characteristics, the output characteristics, and avalanche multiplication are reported for both npn and pnp SiGe HBTs, at both room temperature (300 K) and at cryogenic temperatures (down to 30 K). Comparison of room temperature and cryogenic data suggests interface trap formation at two distinct physical locations in the transistors. Experimental data and calibrated TCAD simulations are used to compare the radiation response of both thick-film SOI devices and thin-film SOI SiGe HBTs. [ABSTRACT FROM AUTHOR]

Proton and X-ray irradiation effects are investigated in 0.35 µm conventional, annular, and ringed-source radiation-hardening-by-design (RHBD) CMOS devices. Transistors were irradiated with protons at both 300 K and 77 K. Radiation-induced oxide trapped charges in the shallow trench isolation (STI) oxide deplete the p-substrate and effectively shunt the source and drain, inducing off-state leakage. Without the STI, RHBD nFETs exhibit no radiation-induced off-state shunt leakage currents for devices irradiated at both 300 K and 77 K. Conventional 0.35 µm pFETs were not degraded by proton irradiation, since the leakage path cannot be formed in the n-well. A simple CMOS logic inverter shows no degradation in output voltage after proton irradiation for all tested temperature and bias conditions. More advanced 130 nm node nFETs show less TID sensitivity to STI leakage due possibly to the smaller physical STI volume and/or additional doping located on the STI sidewall. [ABSTRACT FROM AUTHOR]

Using mixed-mode annealing to help evaluate the responses of modern bipolar transistors, we compare the damage processes associated with X-ray irradiation-induced and hot carrier-induced damage in SiGe HBTs. Stress and radiation measurements indicate that the by-products of both X-ray irradiation-induced and hot carrier-induced trap reactions are identical. We use calculations to better understand the operative damage mechanisms, and find that a hydrogen reaction-diffusion model can predict the observed characteristics of our measurements. Calculations indicate that the transport of hydrogen molecules inside the emitter-base oxides determines the trap generation and recovery processes. [ABSTRACT FROM AUTHOR]

Radiation induced charge trapping in ultrathin HfO2-based n-channel MOSFETs is characterized as a function of dielectric thickness and irradiation bias following exposure to 10 keV X-rays and/or constant voltage stress. Positive and negative oxide-trap charges are observed, depending on irradiation and bias stress conditions. No significant interface-trap buildup is found in these devices under these irradiation and stress conditions. Enhanced oxide-charge trapping occurs in some cases for simultaneous application of constant voltage stress and irradiation, relative to either type of stress applied separately. Room temperature annealing at positive bias after irradiation of transistors with thicker gate dielectric films leads to positive oxide-trapped charge annihilation and/or neutralization in these devices, and net electron trapping. The oxide thickness dependence of the radiation response confirms the extreme radiation tolerance of thin HfO2 dielectric layers of relevance to device applications, and suggests that hole traps in the thicker layers are located in the bulk of the dielectric. A revised methodology is developed to estimate the net effective charge trapping efficiency, fot, for high-κ dielectric films. As a result, estimates of fot for Hf silicate capacitors and Al2O3 transistors in previous work are reduced by up to 18%. [ABSTRACT FROM AUTHOR]

Degradation due to irradiation is known to be associated with the presence of hydrogen in the bulk of the gate oxide, in bulk Si, and at the Si/SiO2 interface. Previous studies have shown that the migration of protons in the oxide for positive applied gate bias and their reactions at the interface can account for the time and dose-rate dependence of the degradation. Recent experiments, however, have shown that interfacial degradation can occur even in the presence of strong negative gate bias that prevents the arrival of protons at the interface from the oxide side. This result suggests that mechanisms in addition to proton drift in SiO2 can lead to radiation-induced interface-trap formation. Since previous work on modeling the enhanced low-dose-rate sensitivity (ELDRS) of irradiated bipolar devices was based on formation of an electrostatic barrier that hinders proton transport to the interface at high dose rates, this effect also must be examined in more detail. In this work we use results from first-principles calculations to demonstrate that hydrogen can also be released easily in bulk Si, and especially in the near interfacial area. This hydrogen moves readily to the interface under negative bias. Typical hydrogen precursors in Si are identified as H-dopant complexes. ELDRS shares thus a common origin with another critical reliability phenomenon, the negative bias-temperature instability. [ABSTRACT FROM AUTHOR]

1.8 MeV proton radiation-induced degradation in high electron mobility transistors with Si-doped AIxGa1-xN and thick GaN cap layersis studied up to a fluence of 1 × 1015 protons/cm2 . The thick GaN cap layer reduces sheet charge modulation induced by the surface states, as it electrostatically separates the active device layers from the surface, thereby enhancing the device performance. The devices exhibit good tolerance up to 1014 protons/cm2, with displacement damage being the primary degradation mechanism. Charged defect centers introduced by proton radiation in the active device layers degrade carrier mobility and sheet carrier density. Proton radiation alters the barrier height at the Schottky gate and increases the resistance of the thin film structure. [ABSTRACT FROM AUTHOR]