1. Air-Gap Transmission Lines on Organic Substrates for Low-Loss Interconnects.
- Author
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Spencer, Todd J., Joseph, Paul Jayachandran, Tae Hong Kim, Swaminathan, Madhavan, and Kohl, Paul A.
- Subjects
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ELECTRIC lines , *CAPACITANCE meters , *ELECTRIC meters , *DIELECTRIC amplifiers , *DIELECTRIC devices , *MICROWAVE integrated circuits , *ELECTRIC circuits , *MICROWAVE transmission lines , *TELECOMMUNICATION lines - Abstract
The fabrication of low-loss transmission line struc- tures with an air dielectric layer is described. The channels are characterized at low frequency (10 and 100 kHz) using capaci- tance and loss tangent and at high frequency (500 MHz to 10 GHz) using S-parameter measurements. The incorporation of an air gap resulted in structures with effective dielectric constants between 1.5-1.8 and significantly lower loss tangents. The fabrication tech- nique could be used to create more complicated air gap transmis- sion line structures for use in monolithic microwave integrated cir- cuits. [ABSTRACT FROM AUTHOR]
- Published
- 2007
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