1. Characterization and Modeling of NBTI in Nanoscale UltraThin Body UltraThin Box FD-SOI MOSFETs
- Author
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T.A. Karatsori, Christoforos G. Theodorou, Gerard Ghibaudo, Nicolas Planes, Sebastien Haendler, Charalabos A. Dimitriadis, Aristotle University of Thessaloniki, Department of Physics, Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation (IMEP-LAHC ), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), and STMicroelectronics [Crolles] (ST-CROLLES)
- Subjects
Materials science ,UTBB MOSFETs ,Gate dielectric ,Silicon on insulator ,Nanotechnology ,02 engineering and technology ,01 natural sciences ,Stress (mechanics) ,Fully depleted silicon-on-insulator (FD-SOI) ,hole-trapping ,0103 physical sciences ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,Electrical and Electronic Engineering ,010302 applied physics ,Negative-bias temperature instability ,business.industry ,Biasing ,Condensed Matter::Mesoscopic Systems and Quantum Hall Effect ,021001 nanoscience & nanotechnology ,negative bias temperature instability (NBTI) ,Electronic, Optical and Magnetic Materials ,Threshold voltage ,Optoelectronics ,Transient (oscillation) ,0210 nano-technology ,business ,AND gate - Abstract
International audience; The negative bias temperature instability (NBTI) is investigated in ultrathin body ultrathin box (UTBB) fully depleted silicon-on-insulator (FD-SOI) p-MOSFETs with zero back gate bias and small drain bias voltage. The threshold voltage shifts during stress at different temperatures and gate bias voltage conditions show that the NBTI is dominated by the trapping of holes in preexisting traps of the gate dielectric, while the recovery transient follows a logarithmic-like time dependence. Considering the hole-trapping/detrapping mechanisms, NBTI modeling has been proposed capturing the temperature and gate voltage dependence.
- Published
- 2016
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