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Start Over Author "Dilhac, J.-M." Journal ieee transactions on electron devices
1 results on '"Dilhac, J.-M."'

1. Temperature control in a rapid thermal processor

Author

Dilhac, J-M., Ganibal, C., Bordeneuve, J., and Nolhier, N.

Subjects
Temperature control -- Research, Business, Electronics, Electronics and electrical industries
Abstract

A new method for temperature control in a rapid thermal processor (RTP) is studied. Two RTPs, one equipped with a stainless-steel reflecting chamber and the other with gold-plated reflecting walls, were used in the experiment. A thermocouple was employed in the measurement of the computer-controlled RTP temperatures. Results indicate that the new technique can achieve better temperature control since it is not affected by the system's process dynamics.

Published
1992

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